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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 27 — Sep. 20, 2013
  • pp: 6840–6848

Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry

Hung-Lin Hsieh and Ssu-Wen Pan  »View Author Affiliations


Applied Optics, Vol. 52, Issue 27, pp. 6840-6848 (2013)
http://dx.doi.org/10.1364/AO.52.006840


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Abstract

A heterodyne grating-based interferometer for three-degree-of-freedom (3-DOF) displacement measurement is proposed. This technique has the merits of both heterodyne interferometry and grating interferometry. A heterodyne light beam is obtained using an electro-optic modulating technique for amplitude modulation. While the heterodyne light beam is normally incident into a transmission-type 2D grating, two detection parts for in-plane and out-of-plane displacement measurements will be obtained. The heterodyne light beam is utilized to carry the optical phase variation that results from grating displacement in three directions. The experimental results demonstrate that the proposed interferometer is capable of sensing the displacement of a motion stage in 3-DOF. The resolution and range of the measurement can achieve up to nanometric and millimetric levels.

© 2013 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(230.1950) Optical devices : Diffraction gratings

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 6, 2013
Revised Manuscript: August 9, 2013
Manuscript Accepted: August 29, 2013
Published: September 20, 2013

Citation
Hung-Lin Hsieh and Ssu-Wen Pan, "Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry," Appl. Opt. 52, 6840-6848 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-27-6840


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References

  1. G. Lerondel, A. Sinno, L. Chassagne, S. Blaize, P. Ruaux, A. Bruyant, S. Topcu, P. Royer, and Y. Alayli, “Enlarge near-field optical imaging,” J. Appl. Phys. 106, 044913 (2009). [CrossRef]
  2. W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono, and Y. Tomita, “A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning,” Precis. Eng. 28, 329–337 (2004). [CrossRef]
  3. C. Egami, N. Nishimura, and T. Okawa, “Jitter-free multi-layered nanoparticles optical storage disk with buffer ring,” Opt. Express 18, 15901–15906 (2010). [CrossRef]
  4. H. C. Yeh, W. T. Ni, and S. S. Pan, “Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry,” Control Eng. Pract. 13, 559–566 (2005). [CrossRef]
  5. N. K. Mohan and P. Rastogi, “Phase-shifting whole-field speckle photography technique for the measurement of in-plane deformation in real time,” Opt. Lett. 27, 565–567 (2002). [CrossRef]
  6. H. J. Wang, J. Y. Chen, C. M. Liu, and L. W. Chen, “Phase-shifting moire interferometry based on a liquid crystal phase modulator,” Opt. Eng. 44, 015602 (2005). [CrossRef]
  7. C. C. Wu, C. C. Hsu, J. Y. Lee, H. Y. Chen, and C. L. Dai, “Optical heterodyne laser encoder with sub-nanometer resolution,” Meas. Sci. Technol. 19, 045305 (2008). [CrossRef]
  8. F. Restagno, J. Crassous, E. Charlaix, and M. Monchanin, “A new capacitive sensor for displacement measurement in a surface-force apparatus,” Meas. Sci. Technol. 12, 16–22 (2001). [CrossRef]
  9. D. E. Duffy, “Moire gauging of in-plane displacement using double aperture imaging,” Appl. Opt. 11, 1778–1781 (1972). [CrossRef]
  10. F. C. Demarest, “High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics,” Meas. Sci. Technol. 9, 1024–1030 (1998). [CrossRef]
  11. H. L. Hsieh, “Novel interferometric stage based on quasi-common-optical-path configuration for large scale displacement,” Ph.D. dissertation (National Central University, 2011).
  12. R. Dandliker, R. Thalmann, and D. Prongue, “Two-wavelength laser interferometry using super-heterodyne detection,” Opt. Lett. 13, 339–341 (1988). [CrossRef]
  13. Z. Sodnik, E. Fischer, T. Ittner, and H. J. Tiziani, “Two-wavelength double heterodyne interferometry using a method grating technique,” Appl. Opt. 30, 3139–3144 (1991). [CrossRef]
  14. R. G. Johnston and W. K. Grace, “Refractive index detector using Zeeman interferometry,” Appl. Opt. 29, 4720–4724 (1990). [CrossRef]
  15. J. Y. Lee, H. Y. Chen, C. C. Hsu, and C. C. Wu, “Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution,” Sens. Actuators A 137, 185–191 (2007). [CrossRef]
  16. F. Cheng and K. C. Fan, “Linear diffraction grating interferometer with high alignment tolerance and high accuracy,” Appl. Opt. 50, 4550–4556 (2011). [CrossRef]
  17. C. C. Hsu, C. C. Wu, J. Y. Lee, H. Y. Chen, and H. F. Weng, “Reflection type heterodyne grating interferometry for in-plane displacement measurement,” Opt. Commun. 281, 2582–2589 (2008). [CrossRef]
  18. H. Schreiber and J. Schwider, “Lateral shearing interferometer based on two Ronchi phase gratings in series,” Appl. Opt. 36, 5321–5324 (1997). [CrossRef]
  19. W. Gao and A. Kimura, “A three-axis displacement sensor with nanometric resolution,” CIRP Ann. 56, 529–532 (2007). [CrossRef]
  20. A. Kimura, W. Gao, W. J. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng. 36, 576–585 (2012). [CrossRef]
  21. X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng. 37, 771–781 (2013). [CrossRef]
  22. D. C. Su, M. H. Chiu, and C. D. Chen, “Simple two-frequency laser,” Precis. Eng. 18, 161–163 (1996). [CrossRef]

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