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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 28 — Oct. 1, 2013
  • pp: 7028–7032

Optimized absolute testing method of shift-rotation

Weihong Song, Fan Wu, Xi Hou, and Yongjian Wan  »View Author Affiliations

Applied Optics, Vol. 52, Issue 28, pp. 7028-7032 (2013)

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The absolute testing method of shift-rotation that combines the traditional N-position method and Zernike polynomial fitting has been commonly employed in surface metrology. It preserves the high spatial frequency of the surface deviation with the N-position method to obtain the rotationally asymmetric surface deviation, but it suffers the kNθ order angular terms errors missed by the N-position method when it calculates the rotationally symmetric surface deviation with the Zernike rotationally symmetric polynomial fitting method. An optimized absolute testing method of shift-rotation is presented in this paper. It considers the missing kNθ order errors when the equations of the rotationally symmetric surface deviation are solved. As a result, it is more accurate than the traditional method. Experimental absolute results of spherical surfaces are given.

© 2013 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 29, 2013
Revised Manuscript: September 4, 2013
Manuscript Accepted: September 10, 2013
Published: October 1, 2013

Weihong Song, Fan Wu, Xi Hou, and Yongjian Wan, "Optimized absolute testing method of shift-rotation," Appl. Opt. 52, 7028-7032 (2013)

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