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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 3 — Jan. 20, 2013
  • pp: 415–421

Laser focus positioning method with submicrometer accuracy

Ilya Alexeev, Johannes Strauss, Andreas Gröschl, Kristian Cvecek, and Michael Schmidt  »View Author Affiliations

Applied Optics, Vol. 52, Issue 3, pp. 415-421 (2013)

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Accurate positioning of a sample is one of the primary challenges in laser micromanufacturing. There are a number of methods that allow detection of the surface position; however, only a few of them use the beam of the processing laser as a basis for the measurement. Those methods have an advantage that any changes in the processing laser beam can be inherently accommodated. This work describes a direct, contact-free method to accurately determine workpiece position with respect to the structuring laser beam focal plane based on nonlinear harmonic generation. The method makes workpiece alignment precise and time efficient due to ease of automation and provides the repeatability and accuracy of the surface detection of less than 1 μm.

© 2013 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(190.1900) Nonlinear optics : Diagnostic applications of nonlinear optics
(190.4350) Nonlinear optics : Nonlinear optics at surfaces
(320.0320) Ultrafast optics : Ultrafast optics

ToC Category:
Ultrafast Optics

Original Manuscript: September 14, 2012
Revised Manuscript: November 21, 2012
Manuscript Accepted: December 10, 2012
Published: January 16, 2013

Ilya Alexeev, Johannes Strauss, Andreas Gröschl, Kristian Cvecek, and Michael Schmidt, "Laser focus positioning method with submicrometer accuracy," Appl. Opt. 52, 415-421 (2013)

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