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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 33 — Nov. 20, 2013
  • pp: 7874–7881

Shadow moiré technology based fast method for the measurement of surface topography

Hong Zhao, Hubing Du, Jing Li, and Yuwei Qin  »View Author Affiliations


Applied Optics, Vol. 52, Issue 33, pp. 7874-7881 (2013)
http://dx.doi.org/10.1364/AO.52.007874


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Abstract

We present a fast phase-shifting shadow moiré device for surface topography measurement. In our setup, multiple light sources located at different positions are controlled to illuminate the grating sequentially. Therefore, the phase shift across the field of view shadow moiré is introduced by changing the distance between the light source and the camera. Thanks to the necessity for mechanical movement being omitted here, the proposed setup can capture the phase-shifting fringe patterns at a high speed. However, affected by the bias modulation and amplitude modulation of the captured fringe patterns, the phase of interest cannot be demodulated by the standard phase-shifting algorithm directly. Thus the principal component analysis (PCA) demodulation approach is used to extract the wrapped phase map. In addition, we develop an iterative procedure to reduce the detuning error introduced by the PCA algorithm. The proposed method implements a fast way to determine the topography of a surface through a simple experimental setup. It is applied to obtain an external surface of a specimen. Both the simulation results and the experimental results show the validity of the proposed technique.

© 2013 Optical Society of America

OCIS Codes
(100.2000) Image processing : Digital image processing
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(150.1135) Machine vision : Algorithms

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: July 23, 2013
Revised Manuscript: October 14, 2013
Manuscript Accepted: October 15, 2013
Published: November 13, 2013

Citation
Hong Zhao, Hubing Du, Jing Li, and Yuwei Qin, "Shadow moiré technology based fast method for the measurement of surface topography," Appl. Opt. 52, 7874-7881 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-33-7874


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References

  1. C. Han and B. Han, “Error analysis of the phase-shifting technique when applied to shadow moiré,” Appl. Opt. 45, 1124–1133 (2006). [CrossRef]
  2. J. J. J. Dirckx, W. F. Decraemer, and G. Dielis, “Phase shift method based on object translation for full field automatic 3-D surface reconstruction from moiré topograms,” Appl. Opt. 27, 1164–1169 (1988). [CrossRef]
  3. G. Mauvoisin, F. Bremand, and A. Lagarde, “Three-dimensional shape reconstruction by phase-shifting shadow moiré,” Appl. Opt. 33, 2163–2169 (1994). [CrossRef]
  4. H. M. Ladak, W. F. Decraemer, J. J. J. Dirckx, and W. R. J. Funnell, “Systematic errors in small deformations measured by use of shadow-moiré topography,” Appl. Opt. 39, 3266–3275 (2000). [CrossRef]
  5. J. A. Gómez-Pedrero and J. A. Quiroga, “Measurement of surface topography by RGB shadow-moiré with direct phase demodulation,” Opt. Lasers Eng. 44, 1297–1310 (2006). [CrossRef]
  6. X. Xie, J. T. Atkinson, M. J. Lalor, and D. R. Burton, “Three-map absolute moiré contouring,” Appl. Opt. 35, 6990–6995 (1996). [CrossRef]
  7. T. Yoshizawa and T. Tomisawa, “Shadow moiré topography by means of the phase-shift method,” Opt. Eng. 32, 1668–1674 (1993). [CrossRef]
  8. L. Jin, Y. Kodera, T. Yoshizawa, and Y. Otani, “Shadow moiré profilometry using the phase-shifting method,” Opt. Eng. 39, 2119–2123 (2000). [CrossRef]
  9. H. B. Du, H. Zhao, B. Li, Z. W. Li, L. Zheng, and L. Feng, “Algorithm for phase shifting shadow moiré with an unknown relative step,” J. Opt. 13, 1–5 (2011).
  10. H. Du, H. Zhao, B. Li, J. Zhao, and S. Cao, “Phase-shifting shadow moiré based on iterative self-tuning algorithm,” Appl. Opt. 50, 6708–6712 (2011). [CrossRef]
  11. H. Du, H. Zhao, B. Li, and S. Cao, “Three frames phase-shifting shadow moiré using arbitrary unknown phase steps,” Meas. Sci. Technol. 23, 105201 (2012). [CrossRef]
  12. L. DAcquisto, L. Fratini, and A. M. Siddiolo, “A modified moiré technique for three-dimensional surface topography,” Meas. Sci. Technol. 13, 613–622 (2002). [CrossRef]
  13. J. Degrieck, W. Van Paepegem, and P. Boone, “Application of digital phase-shift shadow moiré to micro deformation measurements of curved surfaces,” Opt. Lasers Eng. 36, 29–40 (2001). [CrossRef]
  14. D. M. Meadows, W. O. Johnson, and J. B. Allen, “Generation of surface contours by moiré patterns,” Appl. Opt. 9, 942–947 (1970). [CrossRef]
  15. H. Guo and M. Chen, “Least-squares algorithm for phase-stepping interferometry with an unknown relative step,” Appl. Opt. 44, 4854–4858 (2005). [CrossRef]
  16. Z. Y. Wang and B. T. Han, “Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms,” Opt. Lett. 29, 1671–1673 (2004). [CrossRef]
  17. J. Vargas, J. Antonio Quiroga, and T. Belenguer, “Phase-shifting interferometry based on principal component analysis,” Opt. Lett. 36, 1326–1328 (2011). [CrossRef]
  18. J. Vargas, J. A. Quiroga, and T. Belenguer, “Analysis of the principal component algorithm in phase-shifting interferometry,” Opt. Lett. 36, 2215–2217 (2011). [CrossRef]
  19. J. C. Estrada, M. Servin, and J. L. Marroquín, “Local adaptable quadrature filters to demodulate single fringe patterns with closed fringes,” Opt. Express 15, 2288–2298 (2007). [CrossRef]
  20. X. F. Meng, X. Peng, L. Z. Cai, A. M. Li, J. P. Guo, and Y. R. Wang, “Wavefront reconstruction and three-dimensional shape measurement by two-step dc-term-suppressed phase-shifted intensities,” Opt. Lett. 34, 1210–1212 (2009). [CrossRef]
  21. J. Vargas, J. A. Quiroga, C. O. S. Sorzano, J. C. Estrada, and J. M. Carazo, “Two-step demodulation based on Gram-Schmidt orthonormalization method,” Opt. Lett. 37, 443–445 (2012). [CrossRef]

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