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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 4 — Feb. 1, 2013
  • pp: B26–B32

Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system

Chun Guo, Mingdong Kong, Cunding Liu, and Bincheng Li  »View Author Affiliations


Applied Optics, Vol. 52, Issue 4, pp. B26-B32 (2013)
http://dx.doi.org/10.1364/AO.52.000B26


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Abstract

For a coating machine with a planetary rotation system and counterrotating shadowing mask configuration, a shadowing mask was designed using a numerical optimization algorithm to control the thickness uniformity of optical coatings formed on conical substrate. Single-layer magnesium fluoride (MgF2) and antireflective (AR) coating at 193 nm were fabricated on a convex conical substrate holder (with diameter 225 mm, apex angle 140 deg, and height 41 mm) by thermal evaporation. Thickness distribution determined from the transmittance spectra of single-layer MgF2 thin films on BK7 slices showed that uniformities better than 99.3% were experimentally achieved with the designed counterrotating shadowing mask. From the reflectance spectra, uniform optical performance was also obtained for the 193 nm AR coating deposited on fused-silica substrates.

© 2013 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization

History
Original Manuscript: September 5, 2012
Revised Manuscript: November 21, 2012
Manuscript Accepted: November 22, 2012
Published: January 2, 2013

Citation
Chun Guo, Mingdong Kong, Cunding Liu, and Bincheng Li, "Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system," Appl. Opt. 52, B26-B32 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-4-B26

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