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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 4 — Feb. 1, 2013
  • pp: B26–B32

Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system

Chun Guo, Mingdong Kong, Cunding Liu, and Bincheng Li  »View Author Affiliations

Applied Optics, Vol. 52, Issue 4, pp. B26-B32 (2013)

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For a coating machine with a planetary rotation system and counterrotating shadowing mask configuration, a shadowing mask was designed using a numerical optimization algorithm to control the thickness uniformity of optical coatings formed on conical substrate. Single-layer magnesium fluoride (MgF2) and antireflective (AR) coating at 193 nm were fabricated on a convex conical substrate holder (with diameter 225 mm, apex angle 140 deg, and height 41 mm) by thermal evaporation. Thickness distribution determined from the transmittance spectra of single-layer MgF2 thin films on BK7 slices showed that uniformities better than 99.3% were experimentally achieved with the designed counterrotating shadowing mask. From the reflectance spectra, uniform optical performance was also obtained for the 193 nm AR coating deposited on fused-silica substrates.

© 2013 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization

Original Manuscript: September 5, 2012
Revised Manuscript: November 21, 2012
Manuscript Accepted: November 22, 2012
Published: January 2, 2013

Chun Guo, Mingdong Kong, Cunding Liu, and Bincheng Li, "Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system," Appl. Opt. 52, B26-B32 (2013)

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  1. J. A. Monsoriu, W. D. Furlan, P. Andrés, and J. Lancis, “Fractal conical lenses,” Opt. Express 14, 9077–9082 (2006). [CrossRef]
  2. Z. Ding, H. Ren, Y. Zhao, J. Nelson, and Z. Chen, “High-resolution optical coherence tomography over a large depth range with an axicon lens,” Opt. Lett. 27, 243–245 (2002). [CrossRef]
  3. L. Sara, I. Umberto, and C. Robert, “Analysis of the combined impact of the laser spectrum, illuminator miscalibrations, and lens aberrations on the 90 nm technology node imaging with off axis illumination,” Proc. SPIE 6154, 615434 (2006).
  4. I. Huang, L. Lin, and C. L. Lin, “Novel illumination apertures for resolution-enhanced technology and through-pitch critical dimension control,” Proc. SPIE 5754, 1395–1404 (2005). [CrossRef]
  5. A. Bouwers, “Improvement of resolving power of optical systems by a new optical element,” Appl. Sci. Res. 3, 147–148(1954). [CrossRef]
  6. F. Villa and O. Pompa, “Emission pattern of a real vapor sources in high vacuum: an overview,” Appl. Opt. 38, 695–703(1999). [CrossRef]
  7. F. Villa, A. Martínez, and L. E. Regalado, “Correction masks for thickness uniformity in large-area thin films,” Appl. Opt. 39, 1602–1610 (2000). [CrossRef]
  8. J. B. Oliver and D. Talbot, “Optimization of deposition uniformity for large-aperture national ignition facility substrates in a planetary rotation system,” Appl. Opt. 45, 3097–3105 (2006). [CrossRef]
  9. P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, “Deposition and characterization of challenging DUV coatings,” Proc. SPIE 7067, 706708 (2008). [CrossRef]
  10. B. Sassolas, R. Flaminio, J. Franc, C. Michel, J. L. Montorio, N. Morgado, and L. Pinard, “Masking technique for coating thickness control on large and strongly curved aspherical optics,” Appl. Opt. 48, 3760–3765 (2009). [CrossRef]
  11. J. B. Oliver, P. Kupinski, A. L. Rigatti, A. W. Schmid, J. C. Lambropoulos, S. Papernov, and A. Kozlov, “Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings,” Appl. Opt. 50, C19–C26 (2011). [CrossRef]
  12. M. Gross, S. Dligatch, and A. Chtanov, “Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method,” Appl. Opt. 50, C316–C320 (2011). [CrossRef]
  13. F. L. Wang, R. Crocker, and R. Faber, “Large-area uniformity in evaporation coating through a new form of substrate motion,” in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, 2010), pp. 1–3.
  14. G. I. Abzalova, R. S. Sabirov, and A. V. MikhaÏlov, “Depositing uniform-thickness coatings on large surfaces by means of electron-beam evaporation in vacuum,” J. Opt. Technol. 72, 799–801 (2005). [CrossRef]
  15. C. Zaczek, S. Müllender, H. Enkisch, and F. Bijkerk, “Coatings for next generation lithography,” Proc. SPIE 7101, 71010X (2008). [CrossRef]
  16. Y. J. Jen and C. F. Lin, “Anisotropic optical thin films finely sculptured by substrate sweep technology,” Opt. Express 16, 5372–5377 (2008). [CrossRef]
  17. C. C. Jaing, M. C. Liu, C. C. Lee, W. H. Cho, W. T. Shen, C. J. Tang, and B. H. Liao, “Residual stress in obliquely deposited MgF2 thin films,” Appl. Opt. 47, C266–C270(2008). [CrossRef]
  18. FilmWizard, optical coating software.
  19. J. Wang, R. Maier, P. G. Dewa, H. Schreiber, R. A. Bellman, and D. D. Elli, “Nanoporous structure of a GdF3 thin film evaluated by variable angle spectroscopic ellipsometry,” Appl. Opt. 46, 3221–3226 (2007). [CrossRef]
  20. B. C. Li, D. W. Lin, Y. L. Han, C. Guo, Y. D. Zhang, and H. X. Liu, “Anti-reflective fluoride coatings for widely tunable deep-ultraviolet diode-pumped solid-state laser applications,” Chin. Phys. Lett. 27, 044201 (2010). [CrossRef]
  21. B. Suman and P. Kumar, “A survey of simulated annealing as a tool for single and multiobjective optimization,” J. Oper. Res. Soc. Am. 57, 1143–1160 (2006). [CrossRef]

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