OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 4 — Feb. 1, 2013
  • pp: B46–B51

Influence of tilt on collinear calibration of a laser interferometer

Shanzhi Tang, Zhao Wang, Jianmin Gao, and Lihong Zhong  »View Author Affiliations


Applied Optics, Vol. 52, Issue 4, pp. B46-B51 (2013)
http://dx.doi.org/10.1364/AO.52.000B46


View Full Text Article

Acrobat PDF (638 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Collinear calibration is a typical and common method for a laser (heterodyne) interferometer, but it usually suffers from the influence of the tilt of the target retroreflectors and the dissymmetry of the optical paths during the calibration. This paper mainly analyzes and models the calibration error caused by the tilt error of the target retroreflectors and reveals the error source that is the disturbance from the rotary error of the guideway slider pair. Experimental results prove the validity of the analysis and model of the calibration error. The calibration error is up to 0.5 μm when the tilt error is 0.36°, which is large enough to equal the maximum tolerance of laser interferometer (0.5 μm) in use.

© 2013 Optical Society of America

OCIS Codes
(080.2720) Geometric optics : Mathematical methods (general)
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments

History
Original Manuscript: August 23, 2012
Revised Manuscript: November 26, 2012
Manuscript Accepted: December 17, 2012
Published: January 16, 2013

Citation
Shanzhi Tang, Zhao Wang, Jianmin Gao, and Lihong Zhong, "Influence of tilt on collinear calibration of a laser interferometer," Appl. Opt. 52, B46-B51 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-4-B46

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited