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Ultra-compact and fabrication-tolerant polarization rotator based on a bend asymmetric-slab waveguide |
Applied Optics, Vol. 52, Issue 5, pp. 990-996 (2013)
http://dx.doi.org/10.1364/AO.52.000990
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Abstract
We propose and analyze a polarization rotator based on a bend asymmetric-slab waveguide on the silicon-on-insulator platform. The device can be fabricated using standard complementary metal–oxide–semiconductor process involving only two dry etching steps. Compared with the formerly reported polarization rotators based on two-step etching, our introduced device demonstrates a significant improvement for fabrication tolerance. Furthermore, an ultra compact structure of
© 2013 Optical Society of America
OCIS Codes
(130.2790) Integrated optics : Guided waves
(130.3120) Integrated optics : Integrated optics devices
(230.7390) Optical devices : Waveguides, planar
ToC Category:
Integrated Optics
History
Original Manuscript: September 24, 2012
Revised Manuscript: December 19, 2012
Manuscript Accepted: December 22, 2012
Published: February 7, 2013
Citation
Tongtong Cao, Shaowu Chen, Yonghao Fei, Libin Zhang, and Qing-Yang Xu, "Ultra-compact and fabrication-tolerant polarization rotator based on a bend asymmetric-slab waveguide," Appl. Opt. 52, 990-996 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-5-990
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