OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 6 — Feb. 20, 2013
  • pp: 1149–1154

Ultrastable bonding of glass with femtosecond laser bursts

Felix Zimmermann, Sören Richter, Sven Döring, Andreas Tünnermann, and Stefan Nolte  »View Author Affiliations


Applied Optics, Vol. 52, Issue 6, pp. 1149-1154 (2013)
http://dx.doi.org/10.1364/AO.52.001149


View Full Text Article

Enhanced HTML    Acrobat PDF (744 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report on the welding of fused silica with bursts of ultrashort laser pulses. By optimizing the burst frequency and repetition rate, we were able to achieve a breaking resistance of up to 96% of the bulk material, which is significantly higher than conventional high repetition rate laser bonding. The main reason for this stability increase is the reduced stress in the surroundings of the laser induced weld seams, which is proven by measurements of the stress-induced birefringence. A detailed analysis of the shape of the molten structures shows elongated structures in the burst regime. This can be attributed to stronger heating, which is supported by our thermodynamic simulations of the laser melting and bonding process.

© 2013 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(320.0320) Ultrafast optics : Ultrafast optics

ToC Category:
Ultrafast Optics

History
Original Manuscript: October 22, 2012
Revised Manuscript: December 22, 2012
Manuscript Accepted: December 29, 2012
Published: February 11, 2013

Citation
Felix Zimmermann, Sören Richter, Sven Döring, Andreas Tünnermann, and Stefan Nolte, "Ultrastable bonding of glass with femtosecond laser bursts," Appl. Opt. 52, 1149-1154 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-6-1149


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. Berthold, L. Nicola, P. M. Sarro, and M. J. Vellekoop, “Glass-to-glass anodic bonding with standard ic technology thin films as intermediate layers,” Sens. Actuators A Phys. 82, 224–228 (2000). [CrossRef]
  2. U. Goesele and Q.-Y. Tong, “Semiconductor wafer bonding,” Annu. Rev. Mater. Sci. 28, 215–241 (1998). [CrossRef]
  3. M. Shimbo, K. Furukawa, K. Fukuda, and K. Tanzawa, “Silicon-to-silicon direct bonding method,” J. Appl. Phys. 60, 2987–2989 (1986). [CrossRef]
  4. C. Luo and L. Lin, “The application of nanosecond-pulsed laser welding technology in MEMS packaging with a shadow mask,” Sens. Actuators A Phys. 97, 398–404 (2002). [CrossRef]
  5. S. Nolte, M. Will, J. Burghoff, and A. Tuennermann, “Femtosecond waveguide writing: a new avenue to three-dimensional integrated optics,” Appl. Phys. A 77, 109–112 (2003). [CrossRef]
  6. C. B. Schaffer, J. F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition-rate femtosecond laser,” Appl. Phys. A 76, 351–354 (2003). [CrossRef]
  7. S. M. Eaton, H. Zhang, M. L. Ng, J. Li, W. Chen, S. Ho, and P. R. Herman, “Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides,” Opt. Express 16, 9443–9458 (2008). [CrossRef]
  8. S. Richter, S. Döring, A. Tünnermann, and S. Nolte, “Bonding of glass with femtosecond laser pulses at high repetition rates,” Appl. Phys. A 103, 257–261 (2011). [CrossRef]
  9. S. Richter, S. Döring, F. Zimmermann, L. Lescieux, R. Eberhardt, S. Nolte, and A. Tünnermann, “Welding of transparent materials with ultrashort laser pulses,” Proc. SPIE 8244, 824402 (2012). [CrossRef]
  10. J. S. Temenoff and A. G. Mikos, Biomaterials: The Intersection of Biology and Material Science (Prentice-Hall, 2008).
  11. W. Primak and D. Post, “Photoelastic constants of vitreous silica and its elastic coefficient of refractive index,” Appl. Phys. 30, 779–788 (1959). [CrossRef]
  12. S. Eaton, H. Zhang, and P. R. Herman, “Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate,” Opt. Express 13, 4708–4716(2005). [CrossRef]
  13. C. B. Schaffer, J. F. Garcia, and E. Mazur, “Bulk heating of transparent materials using a high-repetition-rate femtosecond laser,” Appl. Phys. A 76, 351–354 (2003). [CrossRef]
  14. N. W. Ashcroft and N. D. Mermin, Solid State Physics(Harcourt College Publishers, 1976).
  15. http://www.corning.com/displaytechnologies .
  16. H. S. Carslaw and J. C. Jäger, Conduction of Heat in Solids (Clarendon, 1959).
  17. J. M. Branlund and A. M. Hofmeister, “Factors affecting heat transfer in natural SiO2 solids,” Am. Mineral. 93, 1620–1629 (2008). [CrossRef]
  18. I. Miyamoto, A. Horn, and J. Gottmann, “Local welding of glass material and its application to direct fusion welding by ps-laser pulses,” J. Laser Micro/Nanoeng. 2, 7–14 (2007). [CrossRef]
  19. M. Shimizu, M. Sakakura, M. Ohnishi, M. Yamaji, Y. Shimotsuma, K. Hirao, and K. Miura, “Three-dimensional temperature distribution and modification mechanism in glass during ultrafast laser irradiation at high repetition rates,” Opt. Express 20, 934–940 (2012). [CrossRef]
  20. Y. Bellouard and M. O. Hongler, “Femtosecond-laser generation of self-organized bubble patterns in fused silica,” Opt. Express 19, 6807–6821 (2011). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited