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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 8 — Mar. 10, 2013
  • pp: 1599–1604

Functional demonstration of a compact silicon diffractive sensor for toluene

Jonathan S. Maikisch and Thomas K. Gaylord  »View Author Affiliations

Applied Optics, Vol. 52, Issue 8, pp. 1599-1604 (2013)

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A compact silicon diffractive sensor detecting toluene in solution is demonstrated. This sensor is fabricated in silicon-on-insulator and utilizes a standard telecommunications wavelength. In-plane diffraction gratings enable micrometer-scale device sizes and intensity-based (as opposed to spectral-based) detection for increased integrability. Precise grating design enables 2-D sensor arrays without the addition of separate optical splitters. Detection of the relative diffracted and transmitted intensities is independent of attenuation and is thus robust. This proof-of-concept sensor is shown to measure toluene concentrations as low as 100 parts per million, corresponding to a refractive index change of 3×104. In addition, a linear sensor array with individual sensor addressability and 2-D array capability is demonstrated. The characteristics of this sensor type make it promising for field-deployable lab-on-a-chip applications.

© 2013 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.0130) Integrated optics : Integrated optics
(130.6010) Integrated optics : Sensors

ToC Category:
Integrated Optics

Original Manuscript: November 29, 2012
Revised Manuscript: February 4, 2013
Manuscript Accepted: February 8, 2013
Published: March 6, 2013

Jonathan S. Maikisch and Thomas K. Gaylord, "Functional demonstration of a compact silicon diffractive sensor for toluene," Appl. Opt. 52, 1599-1604 (2013)

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