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Functional demonstration of a compact silicon diffractive sensor for toluene |
Applied Optics, Vol. 52, Issue 8, pp. 1599-1604 (2013)
http://dx.doi.org/10.1364/AO.52.001599
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Abstract
A compact silicon diffractive sensor detecting toluene in solution is demonstrated. This sensor is fabricated in silicon-on-insulator and utilizes a standard telecommunications wavelength. In-plane diffraction gratings enable micrometer-scale device sizes and intensity-based (as opposed to spectral-based) detection for increased integrability. Precise grating design enables 2-D sensor arrays without the addition of separate optical splitters. Detection of the relative diffracted and transmitted intensities is independent of attenuation and is thus robust. This proof-of-concept sensor is shown to measure toluene concentrations as low as 100 parts per million, corresponding to a refractive index change of
© 2013 Optical Society of America
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.0130) Integrated optics : Integrated optics
(130.6010) Integrated optics : Sensors
ToC Category:
Integrated Optics
History
Original Manuscript: November 29, 2012
Revised Manuscript: February 4, 2013
Manuscript Accepted: February 8, 2013
Published: March 6, 2013
Citation
Jonathan S. Maikisch and Thomas K. Gaylord, "Functional demonstration of a compact silicon diffractive sensor for toluene," Appl. Opt. 52, 1599-1604 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-8-1599
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