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CMOS-integrated geometrically tunable optical filters |
Applied Optics, Vol. 52, Issue 8, pp. 1655-1662 (2013)
http://dx.doi.org/10.1364/AO.52.001655
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Abstract
We present a method for producing monolithically integrated complementary metal–oxide–semiconductor (CMOS) optical filters with different and customer-specific responses. The filters are constituted by a Fabry–Perot resonator formed by two Bragg mirrors separated by a patterned cavity. The filter response can be tuned by changing the geometric parameters of the patterning, and consequently the cavity effective refractive index. In this way, many different filters can be produced at once on a single chip, allowing multichanneling. The filter has been designed, produced, and characterized. The results for a chip with 24 filters are presented.
© 2013 Optical Society of America
OCIS Codes
(050.2230) Diffraction and gratings : Fabry-Perot
(130.3120) Integrated optics : Integrated optics devices
(230.4170) Optical devices : Multilayers
(230.5170) Optical devices : Photodiodes
(050.2065) Diffraction and gratings : Effective medium theory
(310.6628) Thin films : Subwavelength structures, nanostructures
ToC Category:
Diffraction and Gratings
History
Original Manuscript: December 12, 2012
Revised Manuscript: January 27, 2013
Manuscript Accepted: January 28, 2013
Published: March 7, 2013
Citation
Damiana Lerose, Evie Kho Siaw Hei, Bong Ching Ching, Martin Sterger, Liau Chu Yaw, Frank Michael Schulze, Frank Schmidt, Andrei Schmidt, and Konrad Bach, "CMOS-integrated geometrically tunable optical filters," Appl. Opt. 52, 1655-1662 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-8-1655
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