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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 11 — Apr. 10, 2014
  • pp: 2455–2464

Modified subaperture tool influence functions of a flat-pitch polisher with reverse-calculated material removal rate

Zhichao Dong, Haobo Cheng, and Hon-Yuen Tam  »View Author Affiliations

Applied Optics, Vol. 53, Issue 11, pp. 2455-2464 (2014)

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Numerical simulation of subaperture tool influence functions (TIF) is widely known as a critical procedure in computer-controlled optical surfacing. However, it may lack practicability in engineering because the emulation TIF (e-TIF) has some discrepancy with the practical TIF (p-TIF), and the removal rate could not be predicted by simulations. Prior to the polishing of a formal workpiece, opticians have to conduct TIF spot experiments on another sample to confirm the p-TIF with a quantitative removal rate, which is difficult and time-consuming for sequential polishing runs with different tools. This work is dedicated to applying these e-TIFs into practical engineering by making improvements from two aspects: (1) modifies the pressure distribution model of a flat-pitch polisher by finite element analysis and least square fitting methods to make the removal shape of e-TIFs closer to p-TIFs (less than 5% relative deviation validated by experiments); (2) predicts the removal rate of e-TIFs by reverse calculating the material removal volume of a pre-polishing run to the formal workpiece (relative deviations of peak and volume removal rate were validated to be less than 5%). This can omit TIF spot experiments for the particular flat-pitch tool employed and promote the direct usage of e-TIFs in the optimization of a dwell time map, which can largely save on cost and increase fabrication efficiency.

© 2014 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing

ToC Category:
Optical Design and Fabrication

Original Manuscript: December 20, 2013
Revised Manuscript: February 18, 2014
Manuscript Accepted: March 7, 2014
Published: April 9, 2014

Zhichao Dong, Haobo Cheng, and Hon-Yuen Tam, "Modified subaperture tool influence functions of a flat-pitch polisher with reverse-calculated material removal rate," Appl. Opt. 53, 2455-2464 (2014)

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  1. C. A. Haynam, P. J. Wegner, and J. M. Auerbach, “National ignition facility laser performance status,” Appl. Opt. 46, 3276–3303 (2007). [CrossRef]
  2. D. C. Zimmerman, “Feasibility studies for the alignment of the thirty meter telescope,” Appl. Opt. 49, 3485–3498 (2010). [CrossRef]
  3. G. Gilmore, “European extremely large telescope: some history, and the scientific community’s preferences for wavelength,” Proc. SPIE 6986, 698607 (2008). [CrossRef]
  4. M. Lowisch, P. Kuerz, O. Conradi, G. Wittich, and W. Seitz, “Optics for ASML’s NXE:3300B platform,” Proc. SPIE 8679, 86791H (2013). [CrossRef]
  5. G. Y. Yu, D. D. Walker, and H. Y. Li, “Implementing a grolishing process in Zeeko IRP machines,” Appl. Opt. 51, 6637–6641 (2012). [CrossRef]
  6. Z. C. Dong, H. B. Cheng, and H. Y. Tam, “Investigation on removal features of multidistribution fixed abrasive diamond pellets used in the polishing of SiC mirrors,” Appl. Opt. 51, 9373–9382 (2012).
  7. R. A. Jones, “Optimization of computer controlled polishing,” Appl. Opt. 16, 218–224 (1977). [CrossRef]
  8. H. M. Martin, D. S. Andersen, J. R. P. Angel, R. H. Nagel, S. C. West, and R. S. Young, “Progress in the stressed-lap polishing of a 1.8  m f/1 mirror,” Proc. SPIE 1236, 682–690 (1990). [CrossRef]
  9. D. W. Kim and J. H. Burge, “Rigid conformal polishing tool using non-linear visco-elastic effect,” Opt. Express 18, 2242–2257 (2010). [CrossRef]
  10. W. Kordonski and D. Golini, “Progress update in magnetorheological finishing,” Int. J. Mod. Phys. B 13, 2205–2212 (1999). [CrossRef]
  11. H. B. Cheng, Y. Yeung, and B. H. Tong, “Viscosity behavior of magnetic suspensions in fluid-assisted finishing,” Prog. Nat. Sci. 18, 91–96 (2008). [CrossRef]
  12. W. Kordonski, A. Shorey, and A. Sekeres, “New magnetically assisted finishing method: material removal with magnetorheological fluid jet,” Proc. SPIE 5180, 107–114 (2004). [CrossRef]
  13. T. Wang, H. B. Cheng, Z. C. Dong, and H. Y. Tam, “Removal character of vertical jet polishing with eccentric rotation motion using magnetorheological fluid,” J. Mater. Process. Technol. 213, 1532–1537 (2013). [CrossRef]
  14. D. D. Walker, D. Brooks, A. King, R. Freeman, R. Morton, G. McCavana, and S. W. Kim, “The ‘Precessions’ tooling for polishing and figuring flat, spherical and aspheric surfaces,” Opt. Express 11, 958–964 (2003). [CrossRef]
  15. H. Y. Li, D. D. Walker, G. Y. Yu, and W. Zhang, “Modeling and validation of polishing tool influence functions for manufacturing segments for an extremely large telescope,” Appl. Opt. 52, 5781–5787 (2013). [CrossRef]
  16. H. Y. Li, D. D. Walker, G. Y. Yu, A. Sayle, W. Messelink, R. Evans, and A. Beaucamp, “Edge control in CNC polishing, paper 2: simulation and validation of tool influence functions on edges,” Opt. Express 21, 370–381 (2013). [CrossRef]
  17. D. W. Kim, W. H. Park, S. W. Kim, and J. H. Burge, “Parametric modeling of edge effects for polishing tool influence functions,” Opt. Express 17, 5656–5665 (2009). [CrossRef]
  18. D. W. Kim and S. W. Kim, “Static tool influence function for fabrication simulation of hexagonal mirror segments for extremely large telescopes,” Opt. Express 13, 910–917 (2005). [CrossRef]
  19. L. C. Charles, C. M. Egert, and W. H. Kathy, “Advanced matrix based algorithm for ion beam milling of optical components,” Proc. SPIE 1752, 54–62 (1992). [CrossRef]
  20. J. F. Wu, Z. W. Lu, H. X. Zhang, and T. S. Wang, “Dwell time algorithm in ion beam figuring,” Appl. Opt. 48, 3930–3937 (2009). [CrossRef]
  21. D. W. Kim, S. W. Kim, and J. H. Burge, “Non-sequential optimization technique for a computer controlled optical surfacing process using multiple tool influence functions,” Opt. Express 17, 21850–21866 (2009). [CrossRef]
  22. A. Cordero-Davila, J. Gonzalez-Garcia, M. Pedrayes-Lopez, L. A. Aguilar-Chiu, J. Cuautle-Cortes, and C. Robledo-Sanchez, “Edge effects with the Preston equation for a circular tool and workpiece,” Appl. Opt. 43, 1250–1254 (2004). [CrossRef]
  23. Y. P. Feng, H. B. Cheng, T. Wang, Z. C. Dong, and H. Y. Tam, “Optimal strategy for fabrication of large aperture aspheric surfaces,” Appl. Opt. 53, 147–155 (2014). [CrossRef]
  24. J. Wang, Y. G. Li, J. H. Han, Q. Xu, and Y. B. Guo, “Evaluating subsurface damage in optical glasses,” J. Eur. Opt. Soc. 6, 11001 (2011).
  25. R. Avery, F. F. Xi, and G. J. Liu, “Modelling and analysis of contact stress for automated polishing,” Int. J. Mach. Tools Manuf. 46, 424–435 (2006). [CrossRef]
  26. C. F. Cheung, L. B. Kong, L. T. Ho, and S. To, “Modelling and simulation of structure surface generation using computer controlled ultra-precision polishing,” Precis. Eng. 35, 574–590 (2011). [CrossRef]

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