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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 14 — May. 10, 2014
  • pp: 3019–3027

Role of dynamic effects in the characterization of multilayers by means of power spectral density

Anton Haase, Victor Soltwisch, Christian Laubis, and Frank Scholze  »View Author Affiliations

Applied Optics, Vol. 53, Issue 14, pp. 3019-3027 (2014)

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In this paper, we present measurements of angle- and wavelength-resolved diffuse scattering of EUV radiation on a Mo/Si multilayer. Our sample is optimized for high reflectivity at 13.5 nm wavelength near-normal incidence. We present a rigorous theoretical analysis of the off-specular EUV scattering on the basis of the distorted-wave Born approximation. We prove that the determination of the interface roughness power spectral density (PSD) is only possible by considering geometry-dependent and dynamic contributions. The scattering from multilayer mirrors leads to an intrinsic enhancement in off-specular intensity independent of roughness properties. The thickness oscillations in the scattering intensity (Kiessig fringes) are found to cause additional dynamic enhancement in analogy to Bragg-like peaks for grazing incidence geometry. Considering these effects, the interface PSD is consistently determined.

© 2014 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(290.5880) Scattering : Scattering, rough surfaces
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:

Original Manuscript: January 6, 2014
Revised Manuscript: March 24, 2014
Manuscript Accepted: April 4, 2014
Published: May 7, 2014

Anton Haase, Victor Soltwisch, Christian Laubis, and Frank Scholze, "Role of dynamic effects in the characterization of multilayers by means of power spectral density," Appl. Opt. 53, 3019-3027 (2014)

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