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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 14 — May. 10, 2014
  • pp: 3101–3109

Three-dimensional inline inspection for substrate warpage and ball grid array coplanarity using stereo vision

Takeshi Nakazawa and Ayman Samara  »View Author Affiliations


Applied Optics, Vol. 53, Issue 14, pp. 3101-3109 (2014)
http://dx.doi.org/10.1364/AO.53.003101


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Abstract

We present a method for full-field 3D measurement of substrate warpage and ball grid array coplanarity, which is suitable for inline back-end inspection and process monitoring. For evaluating the performance of the proposed system, the linearity between our system and a reference confocal microscope is studied by repeating measurements 35 times with a particular substrate sample ( 38 mm × 28.5 mm ). The point-to-point correlation coefficient with 1 σ between two methods is 0.968 ± 0.002 , and the 2 σ difference is 25.15 ± 0.20 μm for warpage measurement. 1 σ repeatability of the substrate warpage is 4.2 μm. For BGA coplanarity inspection the bump level correlation coefficient is 0.957 ± 0.001 and the 2 σ difference is 28.79 ± 0.14 μm . 1 σ repeatability of BGA coplanarity is 3.7 μm. Data acquisition takes about 0.2 s for full field measurements.

© 2014 Optical Society of America

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(150.0150) Machine vision : Machine vision
(150.3040) Machine vision : Industrial inspection
(150.6910) Machine vision : Three-dimensional sensing
(150.5495) Machine vision : Process monitoring and control

ToC Category:
Machine Vision

History
Original Manuscript: January 30, 2014
Revised Manuscript: April 5, 2014
Manuscript Accepted: April 8, 2014
Published: May 9, 2014

Virtual Issues
Vol. 9, Iss. 7 Virtual Journal for Biomedical Optics

Citation
Takeshi Nakazawa and Ayman Samara, "Three-dimensional inline inspection for substrate warpage and ball grid array coplanarity using stereo vision," Appl. Opt. 53, 3101-3109 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-14-3101


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