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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 19 — Jul. 1, 2014
  • pp: 4275–4281

Mathematical modeling and application of removal functions during deterministic ion beam figuring of optical surfaces. Part 2: application

Wenlin Liao, Yifan Dai, Xuhui Xie, and Lin Zhou  »View Author Affiliations

Applied Optics, Vol. 53, Issue 19, pp. 4275-4281 (2014)

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Ion beam figuring (IBF) is established for the final precision figuring of optical components. In this deterministic method, the figuring process is represented by a two-dimensional (2D) convolution operation of a constant removal function and the dwell time, where the figuring precision is guaranteed by the stability of the removal function as well as the solution accuracy of the dwell time. However, the current 2D convolution equation cannot factually reflect the IBF process of curved surfaces, which neglects the influence of the projection distortion and the workpiece geometry. Consequently, the current convolution algorithm for the IBF process would influence the solution accuracy for the dwell time and reduce the convergence of the figuring process. In this part, we propose an improved algorithm based on the mathematical modeling of the dynamic removal function in Part A, which provides a more accurate dwell time for IBF of a curved surface. Additionally, simulation analysis and figuring experiments are carried out to verify the feasibility of our proposed algorithm. The final experimental results indicate that the figuring precision and efficiency can be simultaneously improved by this method.

© 2014 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing

ToC Category:
Optical Design and Fabrication

Original Manuscript: March 4, 2014
Revised Manuscript: May 27, 2014
Manuscript Accepted: May 27, 2014
Published: June 30, 2014

Wenlin Liao, Yifan Dai, Xuhui Xie, and Lin Zhou, "Mathematical modeling and application of removal functions during deterministic ion beam figuring of optical surfaces. Part 2: application," Appl. Opt. 53, 4275-4281 (2014)

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