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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 20 — Jul. 10, 2014
  • pp: 4548–4554

Measuring nanoparticle size using phase-stepping interferometry: quantifying measurement sensitivity to surface roughness

Douglas J. Little and Deb M. Kane  »View Author Affiliations

Applied Optics, Vol. 53, Issue 20, pp. 4548-4554 (2014)

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A method for sizing nanoparticles using phase-stepping interferometry has been developed recently by Little et al. [Appl. Phys. Lett. 103, 161107 (2013)]. We present an analytical procedure to quantify how sensitive measurement precision is to surface roughness. This procedure computes the standard deviation in the measured phase as a function of the surface roughness power spectrum. It is applied to nanospheres and nanowires on a flat plane and also a flat plane in isolation. Calculated sensitivity levels demonstrate that surface roughness is unlikely to be the limiting factor on measurement precision when measuring nanoparticle size using this phase-shifting-interferometry-based technique. The need to use an underlying surface that is very smooth when measuring nanoparticles is highlighted by the analysis.

© 2014 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(180.3170) Microscopy : Interference microscopy
(100.3175) Image processing : Interferometric imaging
(160.4236) Materials : Nanomaterials

ToC Category:
Imaging Systems

Original Manuscript: November 19, 2013
Revised Manuscript: May 19, 2014
Manuscript Accepted: May 24, 2014
Published: July 9, 2014

Virtual Issues
Vol. 9, Iss. 9 Virtual Journal for Biomedical Optics

Douglas J. Little and Deb M. Kane, "Measuring nanoparticle size using phase-stepping interferometry: quantifying measurement sensitivity to surface roughness," Appl. Opt. 53, 4548-4554 (2014)

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