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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 21 — Jul. 20, 2014
  • pp: 4628–4636

Model-based phase shifting interferometry

Leslie L. Deck  »View Author Affiliations


Applied Optics, Vol. 53, Issue 21, pp. 4628-4636 (2014)
http://dx.doi.org/10.1364/AO.53.004628


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Abstract

A general method of surface profiling with phase-shifting interferometry techniques uses iterative linear regression to fit the sequence of interferograms to a physical model of the cavity. The physical model incorporates all important cavity influences, including environmentally induced rigid-body motion, phase shifter miscalibrations, multiple interference, geometry-induced spatial phase-shift variations, and their cross-couplings. By incorporating an initial estimate of the surface profile and iteratively solving for space- and time-dependent variables separately, convergence is robust and rapid. The technique has no restriction on surface shape or departure.

© 2014 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: April 24, 2014
Manuscript Accepted: May 27, 2014
Published: July 11, 2014

Citation
Leslie L. Deck, "Model-based phase shifting interferometry," Appl. Opt. 53, 4628-4636 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-21-4628


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References

  1. H. Schreiber and J. Bruning, “Optical shop testing,” in Phase Shifting Interferometry, D. Malacara, ed., 3rd ed. (Wiley, 2007), Chap. 14.
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  4. The techniques described in this paper are protected by U.S. patents7,796,273, 7,796,275, 7,948,639, and foreign patents or patents pending.
  5. L. Deck, “Phase shifting interferometry in the presence of vibration,” U.S. patent7,948,639 (24May2011).
  6. The technique described in this paper is marketed by Zygo Corporation under the name QPSI.
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