OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 21 — Jul. 20, 2014
  • pp: 4628–4636

Model-based phase shifting interferometry

Leslie L. Deck  »View Author Affiliations


Applied Optics, Vol. 53, Issue 21, pp. 4628-4636 (2014)
http://dx.doi.org/10.1364/AO.53.004628


View Full Text Article

Enhanced HTML    Acrobat PDF (1143 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A general method of surface profiling with phase-shifting interferometry techniques uses iterative linear regression to fit the sequence of interferograms to a physical model of the cavity. The physical model incorporates all important cavity influences, including environmentally induced rigid-body motion, phase shifter miscalibrations, multiple interference, geometry-induced spatial phase-shift variations, and their cross-couplings. By incorporating an initial estimate of the surface profile and iteratively solving for space- and time-dependent variables separately, convergence is robust and rapid. The technique has no restriction on surface shape or departure.

© 2014 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: April 24, 2014
Manuscript Accepted: May 27, 2014
Published: July 11, 2014

Citation
Leslie L. Deck, "Model-based phase shifting interferometry," Appl. Opt. 53, 4628-4636 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-21-4628

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited