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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 21 — Jul. 20, 2014
  • pp: 4637–4644

Laser beam homogenizing system design for photoluminescence

Shishu Lou, Huishi Zhu, and Peide Han  »View Author Affiliations

Applied Optics, Vol. 53, Issue 21, pp. 4637-4644 (2014)

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Based on waveguide coupling technology, we set a kaleidoscope homogenizer to get an intensity redistributed uniform multimode laser beam and then shape the uniform beam into a large area square beam with an imaging system. The simulation results of overall light intensity uniformity are both greater than 89% under the irradiation areas of 3.5cm×3cm and 10cm×10cm. In the practical application, it is also greater than 85%. After that, we apply this technology to the photoluminescence imaging detection of semiconductor devices, proving that this technology can be widely used in a variety of research requiring large areas of uniform laser illuminating spots.

© 2014 Optical Society of America

OCIS Codes
(140.3300) Lasers and laser optics : Laser beam shaping
(220.4830) Optical design and fabrication : Systems design

ToC Category:
Lasers and Laser Optics

Original Manuscript: April 16, 2014
Revised Manuscript: May 23, 2014
Manuscript Accepted: June 16, 2014
Published: July 11, 2014

Shishu Lou, Huishi Zhu, and Peide Han, "Laser beam homogenizing system design for photoluminescence," Appl. Opt. 53, 4637-4644 (2014)

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