OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 22 — Aug. 1, 2014
  • pp: 4947–4956

Compensation of high-order misalignment aberrations in cylindrical interferometry

Junzheng Peng, Yingjie Yu, and Haifeng Xu  »View Author Affiliations


Applied Optics, Vol. 53, Issue 22, pp. 4947-4956 (2014)
http://dx.doi.org/10.1364/AO.53.004947


View Full Text Article

Enhanced HTML    Acrobat PDF (1451 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Interferometry with a null corrector can be used to test cylindrical surfaces. The requirement for accurate measurement is a null fringe pattern. When the tested cylindrical surface is not perfect or seriously misaligned, a nonzero fringe pattern might be obtained. As a result, high-order misalignment aberrations (e.g., coma and spherical aberration) are introduced into the measurement. The sources and types of high-order misalignment aberrations are analyzed by orthogonal Legendre polynomials. Based on the analysis, a mathematical model was proposed to estimate the high-order misalignment aberrations. Then a wavefront difference method was proposed to calibrate the coefficients of this model. With the calibrated coefficients, the high-order misalignment aberrations can be determined and separated from the measurement results. Several experiments were conducted to demonstrate the validity of the proposed method. Compared with the lower-order misalignment aberrations removal method, the proposed method can reduce the high-order misalignment aberrations by at least half, and highly accurate results can be achieved by the proposed method.

© 2014 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: April 28, 2014
Manuscript Accepted: June 13, 2014
Published: July 23, 2014

Citation
Junzheng Peng, Yingjie Yu, and Haifeng Xu, "Compensation of high-order misalignment aberrations in cylindrical interferometry," Appl. Opt. 53, 4947-4956 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-22-4947


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. Schwider, N. Lindlein, R. Schreiner, and J. Lamprecht, “Grazing-incidence test for cylindrical microlenses with high numerical aperture,” J. Opt. A 4, S10 (2002). [CrossRef]
  2. P. Reardon, F. Liu, and J. Geary, “Schmidt-like corrector plate for cylindrical optics,” Opt. Eng. 49, 053002 (2010). [CrossRef]
  3. J. Peng, D. Ge, Y. Yu, K. Wang, and M. Chen, “Method of misalignment aberrations removal in null test of cylindrical surface,” Appl. Opt. 52, 7311–7323 (2013). [CrossRef]
  4. F. Liu, B. M. Robinson, P. J. Reardon, and J. M. Geary, “Separating misalignment from misfigure in interferograms on cylindrical optics,” Opt. Express 21, 8856–8864 (2013). [CrossRef]
  5. P. Murphy, G. Forbes, J. Fleig, P. Dumas, and M. Tricard, “Stitching interferometry: a flexible solution for surface metrology,” Opt. Photon. News 14(5), 38–43 (2003). [CrossRef]
  6. P. E. Murphy, T. G. Brown, and D. T. Moore, “Interference imaging for aspheric surface testing,” Appl. Opt. 39, 2122–2129 (2000). [CrossRef]
  7. C. Tian, Y. Yang, and Y. Zhuo, “Generalized data reduction approach for aspheric testing in a non-null interferometer,” Appl. Opt. 51, 1598–1604 (2012). [CrossRef]
  8. C. Evans and J. Bryan, “Compensation for errors introduced by nonzero fringe densities in phase-measuring interferometers,” CIRP Annals-Manufact. Technol. 42, 577–580 (1993).
  9. P. Zhou and J. H. Burge, “Limits for interferometer calibration using the random ball test,” Proc. SPIE 7426, 74260U (2009). [CrossRef]
  10. V. N. Mahajan, “Orthonormal aberration polynomials for anamorphic optical imaging systems with rectangular pupils,” Appl. Opt. 49, 6924–6929 (2010). [CrossRef]
  11. D. Malacara-Hernandez, M. Carpio-Valadez, and J. J. Sanchez-Mondragon, “Wavefront fitting with discrete orthogonal polynomials in a unit radius circle,” Opt. Eng. 29, 672–675 (1990). [CrossRef]
  12. V. N. Mahajan and G.-M. Dai, “Orthonormal polynomials in wavefront analysis: analytical solution,” J. Opt. Soc. Am. A 24, 2994–3016 (2007). [CrossRef]
  13. http://diffraction.com/cylinder.php .
  14. “Encoding and fabrication report: Cgh cylinder null h45f15c,” Tech. Rep. (Diffraction International, 2012).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited