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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 22 — Aug. 1, 2014
  • pp: 4947–4956

Compensation of high-order misalignment aberrations in cylindrical interferometry

Junzheng Peng, Yingjie Yu, and Haifeng Xu  »View Author Affiliations

Applied Optics, Vol. 53, Issue 22, pp. 4947-4956 (2014)

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Interferometry with a null corrector can be used to test cylindrical surfaces. The requirement for accurate measurement is a null fringe pattern. When the tested cylindrical surface is not perfect or seriously misaligned, a nonzero fringe pattern might be obtained. As a result, high-order misalignment aberrations (e.g., coma and spherical aberration) are introduced into the measurement. The sources and types of high-order misalignment aberrations are analyzed by orthogonal Legendre polynomials. Based on the analysis, a mathematical model was proposed to estimate the high-order misalignment aberrations. Then a wavefront difference method was proposed to calibrate the coefficients of this model. With the calibrated coefficients, the high-order misalignment aberrations can be determined and separated from the measurement results. Several experiments were conducted to demonstrate the validity of the proposed method. Compared with the lower-order misalignment aberrations removal method, the proposed method can reduce the high-order misalignment aberrations by at least half, and highly accurate results can be achieved by the proposed method.

© 2014 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 28, 2014
Manuscript Accepted: June 13, 2014
Published: July 23, 2014

Junzheng Peng, Yingjie Yu, and Haifeng Xu, "Compensation of high-order misalignment aberrations in cylindrical interferometry," Appl. Opt. 53, 4947-4956 (2014)

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