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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 25 — Sep. 1, 2014
  • pp: 5720–5725

Inverse axial mounting stiffness design for lithographic projection lenses

Yuan Wen-quan, Shang Hong-bo, and Zhang Wei  »View Author Affiliations

Applied Optics, Vol. 53, Issue 25, pp. 5720-5725 (2014)

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In order to balance axial mounting stiffness of lithographic projection lenses and the image quality under dynamic working conditions, an easy inverse axial mounting stiffness design method is developed in this article. Imaging quality deterioration at the wafer under different axial vibration levels is analyzed. The desired image quality can be determined according to practical requirements, and axial vibrational tolerance of each lens is solved with the damped least-squares method. Based on adaptive interval adjustment, a binary search algorithm, and the finite element method, the axial mounting stiffness of each lens can be traveled in a large interval, and converges to a moderate numerical solution which makes the axial vibrational amplitude of the lens converge to its axial vibrational tolerance. Model simulation is carried out to validate the effectiveness of the method.

© 2014 Optical Society of America

OCIS Codes
(110.3000) Imaging systems : Image quality assessment
(110.5220) Imaging systems : Photolithography
(220.1010) Optical design and fabrication : Aberrations (global)
(220.1140) Optical design and fabrication : Alignment
(220.3740) Optical design and fabrication : Lithography
(220.4880) Optical design and fabrication : Optomechanics

ToC Category:
Optical Design and Fabrication

Original Manuscript: May 26, 2014
Revised Manuscript: July 28, 2014
Manuscript Accepted: July 28, 2014
Published: August 27, 2014

Yuan Wen-quan, Shang Hong-bo, and Zhang Wei, "Inverse axial mounting stiffness design for lithographic projection lenses," Appl. Opt. 53, 5720-5725 (2014)

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