OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 3 — Jan. 20, 2014
  • pp: 487–495

Single-step spatial rotation error separation technique for the ultraprecision measurement of surface profiles

Maosheng Hou, Lirong Qiu, Weiqian Zhao, Fan Wang, Entao Liu, and Lin Ji  »View Author Affiliations


Applied Optics, Vol. 53, Issue 3, pp. 487-495 (2014)
http://dx.doi.org/10.1364/AO.53.000487


View Full Text Article

Enhanced HTML    Acrobat PDF (1460 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

To improve the measurement accuracy of the profilometer for large optical surfaces, a new single-step spatial rotation error separation technique (SSEST) is proposed to separate the surface profile error and spindle spatial rotation error, and a novel SSEST-based system for surface profile measurement is developed. In the process of separation, two sets of measured results at the ith measurement circle are obtained before and after the rotation of error separation table, the surface profile error and spatial rotation error of spindle can be determined using discrete Fourier-transform and harmonic analysis. Theoretical analyses and experimental results indicate that SSEST can accurately separate spatial rotation error of spindle from the measured surface profile results within the range of 1–100 upr and improve the accuracy of surface profile measurements.

© 2014 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(180.1790) Microscopy : Confocal microscopy
(220.1250) Optical design and fabrication : Aspherics
(220.3630) Optical design and fabrication : Lenses
(220.4840) Optical design and fabrication : Testing

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: July 29, 2013
Revised Manuscript: November 1, 2013
Manuscript Accepted: December 11, 2013
Published: January 20, 2014

Citation
Maosheng Hou, Lirong Qiu, Weiqian Zhao, Fan Wang, Entao Liu, and Lin Ji, "Single-step spatial rotation error separation technique for the ultraprecision measurement of surface profiles," Appl. Opt. 53, 487-495 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-3-487


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. Burge, L. Kot, H. Martin, C. Zhao, and T. Zobrist, “Alternate surface measurements for GMT primary mirror segments,” Proc. SPIE 6273, 62732T (2006). [CrossRef]
  2. T. Andersen, A. Ardeberg, J. Beckers, A. Goncharova, M. Owner-Petersen, H. Riewaldt, R. Snel, and D. Walker, “The Euro50 extremely large telescope,” Proc. SPIE 4840, 214–225 (2002). [CrossRef]
  3. D. J. Whitehouse, “Measurement techniques,” in Handbook of Surface and Nanometrology, 2nd ed. (Taylor & Francis, 2011), pp. 257–385.
  4. P. Su, R. E. Parks, Y. Wang, C. J. Oh, and J. H. Burge, “Swing-arm optical coordinate measuring machine: modal estimation of systematic errors from dual probe shear measurements,” Opt. Eng. 51, 043601 (2012). [CrossRef]
  5. P. Su, J. H. Burge, and R. E. Parks, “Application of maximum likelihood reconstruction of subaperture data for measurement of large flat mirrors,” Appl. Opt. 49, 21–31 (2010). [CrossRef]
  6. R. Grejda, E. Marsh, and R. Vallance, “Techniques for calibrating spindles with nanometer error motion,” Precis. Eng. 29, 113–123 (2005). [CrossRef]
  7. A. Lewis, S. Oldfield, M. Callender, A. Efstathiou, A. Gee, C. King, and D. Walker, “Accurate arm profilometry-traceable metrology for large mirrors,” in Proceedings of Simposio de Metrología (Academic, 2006), pp. 101–105.
  8. H. Jing, C. King, and D. Walker, “Measurement of influence function using swing arm profilometer and laser tracker,” Opt. Express 18, 5271–5281 (2010). [CrossRef]
  9. H. Jing, C. King, and D. Walker, “Simulation and validation of a prototype swing arm profilometer for measuring extremely large telescope mirror-segments,” Opt. Express 18, 2036–2048 (2010). [CrossRef]
  10. R. Henselmans, L. Cacace, G. Kramer, P. Rosielle, and M. Steinbuch, “The NANOMEFOS non-contact measurement machine for freeform optics,” Precis. Eng. 35, 607–624 (2011). [CrossRef]
  11. “Taylor Hobson PGI Dimension Technical reference brochure” (Taylor Hobson Ltd, 2013), retrieved http://www.taylor-hobson.com/products/10/107.html .
  12. D. Chetwynd and G. Siddall, “Improving the accuracy of roundness measurement,” J. Phys. E 9, 537–544 (1976). [CrossRef]
  13. W. Zhao, Z. Xue, J. Tan, and Z. Wang, “SSEST: a new approach to higher accuracy cylindricity measuring instrument,” Int. J. Mach. Tools Manuf. 46, 1869–1878 (2006). [CrossRef]
  14. W. Zhao, J. Tan, Z. Xue, and S. Fu, “SEST: a new error separation technique for ultra-high precision roundness measurement,” Meas. Sci. Technol. 16, 833–841 (2005). [CrossRef]
  15. S. Zhang, S. To, C. Cheung, and H. Wang, “Dynamic characteristics of an aerostatic bearing spindle and its influence on surface topography in ultra-precision diamond turning,” Int. J. Mach. Tools Manuf. 62, 1–12 (2012). [CrossRef]
  16. W. Zhao, J. B. Tan, Z. Xue, and Z. Feng, “A high precision circuit based on digital techniques for roundness measurement,” Key Eng. Mater. 295, 271–276 (2005). [CrossRef]
  17. W. Zhao, J. Tan, and L. Qiu, “Bipolar absolute differential confocal approach to higher spatial resolution,” Opt. Express 12, 5013–5021 (2004). [CrossRef]
  18. W. Zhao, J. Guo, L. Qiu, Y. Wang, J. Meng, and D. Gao, “Low transmittance ICF capsule geometric parameters measurement using laser differential confocal technique,” Opt. Commun. 292, 62–67 (2013). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited