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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 4 — Feb. 1, 2014
  • pp: 748–755

Tomographic diffractive microscopy and multiview profilometry with flexible aberration correction

H. Liu, J. Bailleul, B. Simon, M. Debailleul, B. Colicchio, and O. Haeberlé  »View Author Affiliations


Applied Optics, Vol. 53, Issue 4, pp. 748-755 (2014)
http://dx.doi.org/10.1364/AO.53.000748


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Abstract

We have developed a tomographic diffractive microscope in reflection, which permits observation of sample surfaces with an improved lateral resolution, compared to a conventional holographic microscope. From the same set of data, high-precision measurements can be performed on the shape of the reflective surface by reconstructing the phase of the diffracted field. Doing so allows for several advantages compared to classical holographic interferometric measurements: improvement in lateral resolution, easier phase unwrapping, reduction of the coherent noise, combined with the high-longitudinal precision provided by interferometric phase measurements. We demonstrate these capabilities by imaging various test samples.

© 2014 Optical Society of America

OCIS Codes
(070.0070) Fourier optics and signal processing : Fourier optics and signal processing
(090.0090) Holography : Holography
(090.1000) Holography : Aberration compensation
(100.6640) Image processing : Superresolution
(110.6955) Imaging systems : Tomographic imaging

ToC Category:
Holography

History
Original Manuscript: November 15, 2013
Revised Manuscript: December 20, 2013
Manuscript Accepted: December 20, 2013
Published: January 30, 2014

Virtual Issues
Vol. 9, Iss. 4 Virtual Journal for Biomedical Optics

Citation
H. Liu, J. Bailleul, B. Simon, M. Debailleul, B. Colicchio, and O. Haeberlé, "Tomographic diffractive microscopy and multiview profilometry with flexible aberration correction," Appl. Opt. 53, 748-755 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-4-748


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