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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 4 — Feb. 1, 2014
  • pp: A205–A211

Reactive ion-assisted deposition of e-beam evaporated titanium for high refractive index TiO2 layers and laser damage resistant, broad bandwidth, high-reflection coatings

John Bellum, Ella Field, Damon Kletecka, and Finis Long  »View Author Affiliations

Applied Optics, Vol. 53, Issue 4, pp. A205-A211 (2014)

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High-reflection coatings with broad bandwidth can be achieved by pairing a low refractive index material, such as SiO2, with a high refractive index material, such as TiO2. To achieve high refractive index, low absorption TiO2 films, we optimized the reactive, ion-assisted deposition process (O2 levels, deposition rate, and ion beam settings) using e-beam evaporated Ti. TiO2 high-index layers were then paired with SiO2 low-index layers in a quarter-wave-type coating to achieve a broader high-reflection bandwidth compared to the same coating composed of HfO2/SiO2 layer pairs. However, the improved bandwidth exhibited by the TiO2/SiO2 coating is associated with lower laser damage threshold. To improve the laser damage resistance of the TiO2/SiO2 coating, we also created four coatings where HfO2 replaced some of the outer TiO2 layers. We present the laser damage results of these coatings to understand the trade-offs between good laser damage resistance and high-reflection bandwidth using TiO2 and HfO2.

© 2013 Optical Society of America

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(220.0220) Optical design and fabrication : Optical design and fabrication
(310.0310) Thin films : Thin films

Original Manuscript: September 4, 2013
Revised Manuscript: November 13, 2013
Manuscript Accepted: November 13, 2013
Published: December 23, 2013

John Bellum, Ella Field, Damon Kletecka, and Finis Long, "Reactive ion-assisted deposition of e-beam evaporated titanium for high refractive index TiO2 layers and laser damage resistant, broad bandwidth, high-reflection coatings," Appl. Opt. 53, A205-A211 (2014)

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