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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 4 — Feb. 1, 2014
  • pp: A259–A269

Characterization of optical coatings using a multisource table-top scatterometer

Alexander von Finck, Tobias Herffurth, Sven Schröder, Angela Duparré, and Stefan Sinzinger  »View Author Affiliations

Applied Optics, Vol. 53, Issue 4, pp. A259-A269 (2014)

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Light scattering measurement and analysis is a powerful tool for the characterization of optical and nonoptical surfaces. To enable a more comprehensive postmeasurement characterization, three visible laser sources were recently implemented in a highly sensitive table-top scatterometer with 3D spherical detection capability. Based on wavelength scaling, the instrument is utilized to characterize thin-film coatings and their substrates with respect to surface roughness, roughness growth, and contamination. Topographic measurement techniques are used to verify the results. The spectral sensitivity to contamination (scatter loss) is demonstrated to be significantly different for single surfaces and interference coatings. In addition, power losses of a highly reflective coating are analyzed.

© 2014 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(240.0310) Optics at surfaces : Thin films
(290.0290) Scattering : Scattering
(290.5820) Scattering : Scattering measurements
(290.5850) Scattering : Scattering, particles

Original Manuscript: September 9, 2013
Revised Manuscript: November 19, 2013
Manuscript Accepted: November 20, 2013
Published: January 15, 2014

Alexander von Finck, Tobias Herffurth, Sven Schröder, Angela Duparré, and Stefan Sinzinger, "Characterization of optical coatings using a multisource table-top scatterometer," Appl. Opt. 53, A259-A269 (2014)

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