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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 4 — Feb. 1, 2014
  • pp: A351–A359

Roughness and optical losses of rugate coatings

T. Herffurth, M. Trost, S. Schröder, K. Täschner, H. Bartzsch, P. Frach, A. Duparré, and A. Tünnermann  »View Author Affiliations

Applied Optics, Vol. 53, Issue 4, pp. A351-A359 (2014)

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Light-scattering measurements on rugate coatings made out of mixtures of SixTayOz and SixHfyOz were performed. Through successive optimization steps for the substrate roughness and deposition parameters, the overall scattering loss could be reduced by 96% to 3.5 ppm. In order to analyze the relevant scattering mechanisms in such coatings, different theoretical models for scattering from bulk and surface imperfections are compared to measured data. The best accordance between simulated and measured data could be achieved for the theory based on bulk imperfections, while the classical roughness based theory, which is used for conventional multilayer systems, gives reasonable good results.

© 2014 Optical Society of America

OCIS Codes
(290.0290) Scattering : Scattering
(290.5880) Scattering : Scattering, rough surfaces
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties

Original Manuscript: September 4, 2013
Revised Manuscript: November 15, 2013
Manuscript Accepted: November 20, 2013
Published: January 23, 2014

T. Herffurth, M. Trost, S. Schröder, K. Täschner, H. Bartzsch, P. Frach, A. Duparré, and A. Tünnermann, "Roughness and optical losses of rugate coatings," Appl. Opt. 53, A351-A359 (2014)

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