Optical properties and laser damage threshold of HfO<sub>2</sub>&#x2013;SiO<sub>2</sub> mixed composite thin films

Shuvendu Jena; Raj Bahadur Tokas; Nitin M. Kamble; Sudhakar Thakur; Naba Kishore Sahoo

doi:10.1364/AO.53.000850

Applied Optics
Vol. 53,
Issue 5,
pp. 850-860
(2014)
•https://doi.org/10.1364/AO.53.000850

Optical properties and laser damage threshold of HfO₂–SiO₂ mixed composite thin films

Shuvendu Jena, Raj Bahadur Tokas, Nitin M. Kamble, Sudhakar Thakur, and Naba Kishore Sahoo

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Shuvendu Jena, Raj Bahadur Tokas, Nitin M. Kamble, Sudhakar Thakur, and Naba Kishore Sahoo, "Optical properties and laser damage threshold of HfO₂–SiO₂ mixed composite thin films," Appl. Opt. 53, 850-860 (2014)

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Abstract

${HfO}_{2} - {SiO}_{2}$ mixed composite thin films have been deposited on fused silica substrate by co-evaporation of ${HfO}_{2}$ and ${SiO}_{2}$ through the reactive electron-beam evaporation technique. The composition-dependent refractive index and the absorption coefficient have been analyzed using different effective medium approximation (EMA) models in order to evaluate the suitability of these models for such mixed composite thin films. The discrepancies between experimentally determined and EMA-computed values are explained through microstructural and morphological evolutions observed in these mixed composite films. Finally, the dependence of the laser damage threshold as a function of silica content has been investigated, and the improved laser-induced damage threshold for films having more than 80% silica content has been explained through the defect-assisted multiphoton ionization process.

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${HfO}_{2} (%) - {SiO}_{2} (%$ )	Thickness Measured In Situ (nm)	Thickness Derived from Transmission Spectra (nm)	Bandgap (eV)	Film Density ( $g / {cm}^{3}$ )	Roughness (nm) GIXR	Roughness (nm) AFM	Grain Size (nm)	LIDT $F_{th} (J / {cm}^{2})$
100–0	$521 \pm 10$	$512 \pm 0.3$	5.57	8.42	3.35	5.62	$196 \pm 30$	$18.05 \pm 2.88$
90–10	$517 \pm 11$	$503 \pm 0.3$	5.62	8.90	1.53	1.12	$59 \pm 15$	$20.68 \pm 3.30$
80–20	$419 \pm 08$	$438 \pm 0.4$	5.67	7.62	0.50	1.01	$49 \pm 17$	$19.06 \pm 3.00$
70–30	$479 \pm 09$	$483 \pm 0.8$	5.68	7.13	1.36	1.27	$49 \pm 11$	$18.71 \pm 3.00$
60–40	$582 \pm 10$	$563 \pm 0.4$	5.71	6.54	0.85	1.35	$49 \pm 16$	$20.90 \pm 3.34$
50–50	$571 \pm 12$	$565 \pm 0.8$	5.72	6.20	1.93	2.16	$88 \pm 21$	$22.00 \pm 3.52$
40–60	$626 \pm 13$	$615 \pm 1.2$	5.76	5.43	0.52	1.44	$69 \pm 14$	$23.98 \pm 3.83$
30–70	$694 \pm 14$	$705 \pm 0.8$	5.83	5.34	0.32	1.52	$69 \pm 19$	$24.19 \pm 3.87$
20–80	$642 \pm 13$	$663 \pm 0.8$	–	3.62	1.48	1.59	$59 \pm 13$	$40.70 \pm 6.51$
10–90	$590 \pm 12$	$603 \pm 0.4$	–	2.64	1.50	1.67	$94 \pm 27$	$42.51 \pm 6.80$
0–100	$621 \pm 17$	$609 \pm 0.8$	–	2.60	1.41	1.51	$81 \pm 16$	$45.24 \pm 7.21$
Fused silica	–	–	8.5^Ref. 56	2.46	0.20	0.60	$9 \pm 3$	$57.60 \pm 9.21$

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Applied Optics