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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 7 — Mar. 1, 2014
  • pp: 1396–1405

Parameter extraction from fabricated silicon photonic devices

Xi Chen, Zheng Li, Moustafa Mohamed, Li Shang, and Alan R. Mickelson  »View Author Affiliations


Applied Optics, Vol. 53, Issue 7, pp. 1396-1405 (2014)
http://dx.doi.org/10.1364/AO.53.001396


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Abstract

Three sets of devices were simulated, designed, and laid out for fabrication in the EuroPractice shuttle program and then measured in-house after fabrication. A combination of analytical and numerical modeling is used to extract the dispersion curves that define the effective index of refraction as a function of wavelength for three different classes of silicon photonic devices, namely, micro-ring resonators, racetrack resonators, and directional couplers. The results of this phenomenological study are made plausible by the linearity of the extracted dispersion curves with wavelength over the wavelength regime of interest (S and C bands) and the use of the determined effective indices to reconstruct the measured transmission as a function of wavelength curves in close agreement with experiment. The extracted effective indices can be used to place limits on the actual fabricated values of waveguide widths, thicknesses, radii of curvature, and coupling gaps.

© 2014 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(220.4241) Optical design and fabrication : Nanostructure fabrication
(130.7408) Integrated optics : Wavelength filtering devices

ToC Category:
Integrated Optics

History
Original Manuscript: October 31, 2013
Revised Manuscript: January 22, 2014
Manuscript Accepted: January 23, 2014
Published: February 27, 2014

Citation
Xi Chen, Zheng Li, Moustafa Mohamed, Li Shang, and Alan R. Mickelson, "Parameter extraction from fabricated silicon photonic devices," Appl. Opt. 53, 1396-1405 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-7-1396


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