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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 9 — Mar. 20, 2014
  • pp: 1775–1781

Flexible mask illumination setup for serial multipatterning in Talbot lithography

Daniel Thomae, Jacqueline Maaß, Oliver Sandfuchs, Alexandre Gatto, and Robert Brunner  »View Author Affiliations


Applied Optics, Vol. 53, Issue 9, pp. 1775-1781 (2014)
http://dx.doi.org/10.1364/AO.53.001775


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Abstract

A flexible illumination system for Talbot lithography is presented, in which the Talbot mask is illuminated by discrete but variable incidence angles. Changing the illumination angle stepwise in combination with different exposure doses for different angles offers the possibility to generate periodic continuous surface relief structures. To demonstrate the capability of this approach, two exemplary micro-optical structures were manufactured. The first example is a blazed grating with a stepsize of 1.5 μm. The second element is a specific beam splitter with parabolic-shaped grating grooves. The quality of the manufacturing process is evaluated on the basis of the optical performance of the resulting micro-optical elements.

© 2014 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(070.6760) Fourier optics and signal processing : Talbot and self-imaging effects
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: December 6, 2013
Revised Manuscript: February 6, 2014
Manuscript Accepted: February 6, 2014
Published: March 14, 2014

Citation
Daniel Thomae, Jacqueline Maaß, Oliver Sandfuchs, Alexandre Gatto, and Robert Brunner, "Flexible mask illumination setup for serial multipatterning in Talbot lithography," Appl. Opt. 53, 1775-1781 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-9-1775


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References

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