Abstract

A three-dimensional model was established to simulate the process of a millisecond Nd:YAG laser irradiating the CCD, based on its array and multilayer structure. The transient temperature and thermal stress field of the CCD were calculated by using the finite element method. The temperature dependence of material parameters was taken into consideration in the calculation. The results indicated that coupling of the heat damage and thermal stress damage was the main reason for the millisecond laser damage CCD. Softening of the PMMA microlens or rupture of the silica microlens reduced the fill factor of the CCD. Plastic deformation of the silicon substrate increased a great deal of dark current. The leakage current was introduced due to the peeled Al shield. Most importantly, the melting through of the Al-shield layer and the fracture of the silica insulating layer are the two critical factors for functional damage to the CCD. Meanwhile, the influence of the material and fill factor of the microlens was also considered. The results showed that plastic damage of the silicon substrate was more dramatic than the PMMA microlens CCD. And the damage threshold decreased along with the increasing fill factor.

© 2015 Optical Society of America

Mechanisms for laser-induced functional damage to silicon charge-coupled imaging sensors

Chenzhi Zhang, Ludovic Blarre, Rodger M. Walser, and Michael F. Becker
Appl. Opt. 32(27) 5201-5210 (1993)

Study on the mechanism of a charge-coupled device detector irradiated by millisecond pulse laser under functional loss

Mingxin Li, Guangyong Jin, Yong Tan, Ming Guo, and Pengbo Zhu
Appl. Opt. 55(6) 1257-1261 (2016)

Numerical and experimental study of the thermal stress of silicon induced by a millisecond laser

Xi Wang, Yuan Qin, Bin Wang, Liang Zhang, Zhonghua Shen, Jian Lu, and Xiaowu Ni
Appl. Opt. 50(21) 3725-3732 (2011)

Numerical simulation of millisecond laser-induced damage in silicon-based positive-intrinsic-negative photodiode

Zewen Li, Xi Wang, Zhonghua Shen, Jian Lu, and Xiaowu Ni
Appl. Opt. 51(14) 2759-2766 (2012)

Experiment on the temporal evolution characteristics of a CCD multilayer structure irradiated by a 1.06  μm continuous laser

Min Han, Jinsong Nie, Ke Sun, Xi Wang, and Xian’an Dou
Appl. Opt. 57(16) 4415-4420 (2018)