Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

High-precision surface measurement with an automated multiangle low coherence interferometer

Not Accessible

Your library or personal account may give you access

Abstract

We propose a novel measurement system based on a low coherence Michelson interferometer and six-axis hexapod platform to accurately measure structures with high aspect ratio using different tilt angles of the measured surface. In order to realize automatic measurement, the system is designed to automatically perform autofocusing, adjust the tilt angle of the test surface, make surface measurements, and merge the measurement data sets. Due to certain topography, e.g., structures with high aspect ratio, the interferometer cannot obtain enough reflected light to evaluate the height information in some areas of the test surface. For this reason, we developed a measurement system that uses measurements from different tilt angles of the test surface and stitching algorithms to realize a complete surface measurement data set. The performance of the proposed measurement system is evaluated experimentally and compared to the results of measurements using a perthometer.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

Kamil Liżewski, Sławomir Tomczewski, Tomasz Kozacki, and Julianna Kostencka
Appl. Opt. 53(11) 2446-2454 (2014)

Automatic measurement system for large-aperture-angle non-holonomic spherical stitching with laser differential confocal interference

Zheng Yang, Shuai Yang, Jiahao Zhao, Liang Tang, Jian Cui, Yun Wang, Lirong Qiu, and Weiqian Zhao
Appl. Opt. 63(3) 699-707 (2024)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved