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Applied Optics

Applied Optics


  • Vol. 6, Iss. 1 — Jan. 1, 1967
  • pp: 168–169

On the Calculation of Thin Film Refractive Index and Thickness by Ellipsometry

D. A. Holmes  »View Author Affiliations

Applied Optics, Vol. 6, Issue 1, pp. 168-169 (1967)

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No abstract available.

Original Manuscript: August 8, 1966
Published: January 1, 1967

D. A. Holmes, "On the Calculation of Thin Film Refractive Index and Thickness by Ellipsometry," Appl. Opt. 6, 168-169 (1967)

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  1. F. L. McCrackin, E. Passaglia, R. R. Stromberg, H. L. Steinberg, J. Res. Natl. Bur. Std. 67A, 363 (1963). Except when specified otherwise, the same notation as this reference is used. [CrossRef]
  2. The values for n1, n3, ϕ1, and ρare given in Table 6, p. 376, of Ref. 1. The value for λ is given on p. 366 of Ref. 1.
  3. It would probably be the exception, rather than the rule, to find more than one physically meaningful root of Eqs. (6a) and (6b). In specific cases, it has been shown that, for n1, n3, ϕ1at fixed values, a given value of ρcan be obtained only with a single, unique value of n2. See, for example, O. S. Heavens, in Physics of Thin Films, G. Hass, R. Thun, Eds. (Academic Press, New York and London, 1964), p. 224; and R. J. Archer, J. Opt. Soc. Am. 52, 970 (1962). [CrossRef]

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