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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 6, Iss. 10 — Oct. 1, 1967
  • pp: 1673–1677

A Computer-Operated Following Ellipsometer

J. L. Ord and B. L. Wills  »View Author Affiliations


Applied Optics, Vol. 6, Issue 10, pp. 1673-1677 (1967)
http://dx.doi.org/10.1364/AO.6.001673


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Abstract

This paper describes the construction and performance of a computer-operated following ellipsometer. By modifying a conventional ellipsometer and operating it with a process control computer, the polarizer and analyzer null positions can he located in about one second with a resolution of 0.01°. This instrument has been used successfully for in situ studies of the buildup and removal of thin anodic oxide films. As the growth of a film is monitored, the computer also plots the null positions of an X-Y recorder and stores all the experimental data for later printing, punching on cards, or replotting along with theoretical curves.

© 1967 Optical Society of America

History
Original Manuscript: April 12, 1967
Published: October 1, 1967

Citation
J. L. Ord and B. L. Wills, "A Computer-Operated Following Ellipsometer," Appl. Opt. 6, 1673-1677 (1967)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-6-10-1673


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References

  1. F. L. McCrackin, J. P. Colson, NBS Tech. Note 242 (1964).
  2. H. Takasaki, Appl. Opt. 5, 759 (1966). [CrossRef] [PubMed]
  3. A. K. N. Reddy, J. O’M. Bockris, NBS Misc. Pub. 256, 229 (1964).
  4. J. L. Ord, D. J. DeSmet, J. Electrochem. Soc. 113, 1258 (1966). [CrossRef]
  5. F. L. McCrackin, E. Passaglia, R. R. Stromberg, H. L. Steinberg, J. Res. Natl. Bur. Std. A 67, 363 (1963). [CrossRef]

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