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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 9, Iss. 8 — Aug. 1, 1970
  • pp: 1868–1873

Azimuthal Misalignment and Surface Anisotropy as Sources of Error in Ellipsometry

M. J. Dignam and M. Moskovits  »View Author Affiliations


Applied Optics, Vol. 9, Issue 8, pp. 1868-1873 (1970)
http://dx.doi.org/10.1364/AO.9.001868


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Abstract

In employing ellipsometry to determine the complex refractive index of a reflecting surface, a small systematic error in the zero-angle positions of the polarizers is shown under certain circumstances to have a large effect on the values of the optical constants calculated. The effect of superficial optical anisotropy on ellipsometry in general, and on the zero position determination in particular, is analyzed and a test for the presence of such anisotropy presented.

© 1970 Optical Society of America

History
Original Manuscript: December 12, 1969
Published: August 1, 1970

Citation
M. J. Dignam and M. Moskovits, "Azimuthal Misalignment and Surface Anisotropy as Sources of Error in Ellipsometry," Appl. Opt. 9, 1868-1873 (1970)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-9-8-1868

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