1 May 2008, Volume 47, Issue 13, pp. 2186-2540;
Feat. pp: OIC1; C1–C323
95 articles
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Schematic diagram of the Leybold Optics APS 904 deposition plant and the plasma ion-assisted evaporation process. For details, see the paper by Füchsel et al., pages C297-C302.
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