Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Confocal pore size measurement based on super-resolution image restoration

Not Accessible

Your library or personal account may give you access

Abstract

A confocal pore size measurement based on super-resolution image restoration is proposed to obtain a fast and accurate measurement for submicrometer pore size of nuclear track-etched membranes (NTEMs). This method facilitates the online inspection of the pore size evolution during etching. Combining confocal microscopy with super-resolution image restoration significantly improves the lateral resolution of the NTEM image, yields a reasonable circle edge-setting criterion of 0.2408, and achieves precise pore edge detection. Theoretical analysis shows that the minimum measuring diameter can reach 0.19 μm, and the root mean square of the residuals is only 1.4 nm. Edge response simulation and experiment reveal that the edge response of the proposed method is better than 80 nm. The NTEM pore size measurement results obtained by the proposed method agree well with that obtained by scanning electron microscopy.

© 2014 Optical Society of America

Full Article  |  PDF Article
More Like This
Improving spatial resolution of confocal Raman microscopy by super-resolution image restoration

Han Cui, Weiqian Zhao, Yun Wang, Ying Fan, Lirong Qiu, and Ke Zhu
Opt. Express 24(10) 10767-10776 (2016)

Super-resolution radially polarized-light pupil-filtering confocal sensing technology

Fang Tang, Yun Wang, Lirong Qiu, Weiqian Zhao, and Yingbin Sun
Appl. Opt. 53(31) 7407-7414 (2014)

High-resolution terahertz reflective imaging and image restoration

Sheng-Hui Ding, Qi Li, Rui Yao, and Qi Wang
Appl. Opt. 49(36) 6834-6839 (2010)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (15)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved