Abstract

This paper presents the analysis and compensation of the errors crosstalk in our developed simultaneous measuring system for five-degree-of-freedom geometric error. The errors crosstalk, including the yaw crosstalk to the horizontal straightness, the pitch crosstalk to the vertical straightness, the roll crosstalk to the horizontal and vertical straightness, and the roll real value crosstalk to the roll measured value, can all be eliminated with the compensation. A series of experiments is conducted, and the results verify the compensation effect. For a linear stage, compared with an electronic level and a laser interferometer, the residuals are less than $2^{\prime \prime }$ when the roll errors are compensated, and the largest residuals for the compensated horizontal and vertical straightness are 1.9 and 3.5 μm, respectively.

© 2015 Optical Society of America

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