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  • Applied Spectroscopy
  • Vol. 59,
  • Issue 7,
  • pp. 952-955
  • (2005)

Near-Infrared Spectroscopy for Monitoring Wafer Etchant Solution Using a Teflon Tube

Youngbok Lee, Sanghee Nah, Hankyu Namkung, and Hoeil Chung

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