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Applied Spectroscopy

Applied Spectroscopy

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  • Vol. 59, Iss. 7 — Jul. 1, 2005
  • pp: 952–955

Near-Infrared Spectroscopy for Monitoring Wafer Etchant Solution Using a Teflon Tube

Youngbok Lee, Sanghee Nah, Hankyu Namkung, and Hoeil Chung

Applied Spectroscopy, Vol. 59, Issue 7, pp. 952-955 (2005)


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Citation
Youngbok Lee, Sanghee Nah, Hankyu Namkung, and Hoeil Chung, "Near-Infrared Spectroscopy for Monitoring Wafer Etchant Solution Using a Teflon Tube," Appl. Spectrosc. 59, 952-955 (2005)
http://www.opticsinfobase.org/as/abstract.cfm?URI=as-59-7-952


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