This review covers the development of electron microprobe analysis in the last ten years. After a brief decription of the instrument, the following subjects are discussed: progress and instrumentation; progress in the theory of quantitative analysis; and the future development of microprobe analysis.
Kurt F. J. Heinrich, "Electron Probe Microanalysis: A Review," Appl. Spectrosc. 22, 395-403 (1968)
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