Abstract

This review covers the development of electron microprobe analysis in the last ten years. After a brief decription of the instrument, the following subjects are discussed: progress and instrumentation; progress in the theory of quantitative analysis; and the future development of microprobe analysis.

Three-dimensional analysis of urban aerosols by use of a combined lidar, scanning electron microscopy, and x-ray microanalysis

Emeric Frejafon, Jérôme Kasparian, Patrick Rambaldi, Jin Yu, Brigitte Vezin, and Jean Pierre Wolf
Appl. Opt. 37(12) 2231-2237 (1998)

An Analysis of the Factors in Spectrochemical Microanalysis*

J. K. Hurwitz
J. Opt. Soc. Am. 42(7) 484-489 (1952)

Spectrochemical microanalysis of aluminum alloys by laser-induced breakdown spectroscopy: identification of precipitates

Igor V. Cravetchi, Mike Taschuk, Georg W. Rieger, Ying Y. Tsui, and Robert Fedosejevs
Appl. Opt. 42(30) 6138-6147 (2003)

Calculation of Integrated Intensities in Spectrographic Microanalysis*

J. K. Hurwitz
J. Opt. Soc. Am. 44(1) 30-34 (1954)

Microanalysis of tool steel and glass with laser-induced breakdown spectroscopy

Klaus Loebe, Arnold Uhl, and Hartmut Lucht
Appl. Opt. 42(30) 6166-6173 (2003)