Abstract
An infrared absorption method in the 1- to 15-μ range has been developed for determining HF, HCl, HCF<sub>3</sub>, and SiF<sub>4</sub> in WF<sub>6</sub> gas. Because of the reactivity and corrosiveness of WF<sub>6</sub>, a special gas absorption cell and gas-sampling apparatus were designed and built. Calibration curves were generated for a 10-cm cell. Sensitivity values were 100 wppm for HF and HCl, and 10 wppm for HCF<sub>3</sub> and SiF<sub>4</sub>.
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