OSA's Digital Library

Applied Spectroscopy

Applied Spectroscopy


  • Vol. 29, Iss. 3 — May. 1, 1975
  • pp: 268–269

Simple Programming of Ion Scattering Spectrometer for Elemental Profiling

W. L. Baun

Applied Spectroscopy, Vol. 29, Issue 3, pp. 268-269 (1975)

View Full Text Article

Acrobat PDF (186 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


Elemental surface profiling techniques such as Auger electron spectroscopy, secondary ion mass spectroscopy, and ion scattering spectroscopy use about a 1- to 3-keV beam of ions to sputter away the surface as spectra are obtained. For a complete profile of even a thin film, many repetitive runs are necessary. In the standard commercial ion scattering spectrometer (ISS) (3M Company) the voltages to the plates of the spectrometer are increased during a scan by a motor-driven precision potentiometer. After each spectrum the potentiometer must manually be returned to zero or to the selected restart point. This procedure requires a great deal of operator attention and does not lend itself to signal averaging or digital data acquisition.

W. L. Baun, "Simple Programming of Ion Scattering Spectrometer for Elemental Profiling," Appl. Spectrosc. 29, 268-269 (1975)

Sort:  Journal  |  Reset


References are not available for this paper.

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited