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Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 30,
  • Issue 1,
  • pp. 34-38
  • (1976)

Temperature Determination in an Inductively Coupled rf Plasma

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Abstract

Simultaneous relative radiances of the H<sub>β</sub>, H<sub>γ</sub>, and H<sub>δ</sub> spectral lines of hydrogen were measured sequentially at various lateral positions in an inductively coupled rf argon-hydrogen plasma operated at atmospheric pressure (12 kW, 9 MHz). Measurements to take self-absorption into account were also performed. By applying an Abel integral inversion, a radial radiance profile for each line was obtained. With the two-line temperature method, simultaneous temperature profiles were obtained from each of the three line-pairs. The difference between these three sets of values and the negative values obtained for the H<sub>γ</sub>:H<sub><i>δ</i></sub> pair indicates that thermal equilibrium does not exist in this plasma.

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