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Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 35,
  • Issue 3,
  • pp. 324-328
  • (1981)

Preparation of Standards for Thin Film Thickness Measurements by Energy Dispersive X-ray Analysis

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Abstract

Thin film measurements by energy dispersive X-ray analysis require appropriate standards. A method for preparing such standards by deposition of thin films and direct measurements of their thickness with a scanning electron microscope is described. These standards have been used to measure thickness of corrosion layers to within ±8.0 nm accuracy.

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