Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 37,
  • Issue 6,
  • pp. 571-573
  • (1983)

Modification of a Plasma-Therm Inductively Coupled Plasma Supply to Enable Radio-frequency Power Modulation

Not Accessible

Your library or personal account may give you access

Abstract

A simple modification is described to enable amplitude modulation of the output of a commercial 5.0 kW inductively coupled plasma (ICP) power supply. Power modulation of an ICP might be useful in a number of practical and research situations. For example, amplitude modulation could be employed in a manner similar to optical chopping to improve signal detection efficiency in practical elemental analysis. Similarly, amplitude modulation permits the time-dependent energy flow in the plasma to be monitored.

PDF Article
More Like This
Propagation characteristics of terahertz wave in inductively coupled plasma

Jinhai Sun, Yan Zheng, Jielin Shi, Yarui Zhao, Yu Li, Ding Wu, He Cai, Xutao Zhang, Xianli Zhu, Yongqiang Liu, Xinxue Sun, Zengming Chao, Hongcheng Yin, Wenqi Lu, and Hongbin Ding
Opt. Express 29(22) 35837-35847 (2021)

Multielemental analysis of prehistoric animal teeth by laser-induced breakdown spectroscopy and laser ablation inductively coupled plasma mass spectrometry

Michaela Galiová, Jozef Kaiser, Francisco J. Fortes, Karel Novotný, Radomír Malina, Lubomír Prokeš, Aleš Hrdlička, Tomáš Vaculovič, Miriam Nývltová Fišáková, Jiří Svoboda, Viktor Kanický, and Javier J. Laserna
Appl. Opt. 49(13) C191-C199 (2010)

Refractive sapphire microlenses fabricated by chlorine-based inductively coupled plasma etching

Si-Hyun Park, Heonsu Jeon, Youn-Joon Sung, and Geun-Young Yeom
Appl. Opt. 40(22) 3698-3702 (2001)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.