OSA's Digital Library

Applied Spectroscopy

Applied Spectroscopy

| PUBLISHED BY SAS — AVAILABLE FROM SAS AND OSA

  • Vol. 43, Iss. 6 — Aug. 1, 1989
  • pp: 912–917

Radiative and Electrical Properties of a Planar Magnetron Glow Discharge Device

Lori McCaig, Richard Sacks, and David Lubman

Applied Spectroscopy, Vol. 43, Issue 6, pp. 912-917 (1989)


View Full Text Article

Acrobat PDF (575 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

A glow discharge with a planar cathode in a curved magnetic field is described. The device relies on gradient drift, curvature drift, and electrostatic reflection of electrons to obtain high cathodic sputtering rates at unusually low voltages and pressures. Gradient drift and curvature drift of electrons occur when the magnetic field is inhomogeneous or nonlinear, respectively. The device is characterized in the pressure range from 1.0 to 0.01 Torr. Line intensities from cathodically sputtered material are highest, and continuum background intensity lowest, at pressures less than 0.06 Torr. Design features and performance data are considered.

Citation
Lori McCaig, Richard Sacks, and David Lubman, "Radiative and Electrical Properties of a Planar Magnetron Glow Discharge Device," Appl. Spectrosc. 43, 912-917 (1989)
http://www.opticsinfobase.org/as/abstract.cfm?URI=as-43-6-912


Sort:  Journal  |  Reset

References

References are not available for this paper.

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited