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Applied Spectroscopy

Applied Spectroscopy

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  • Vol. 43, Iss. 6 — Aug. 1, 1989
  • pp: 924–932

An Instrumental System for Simultaneous Measurement of Spatially Resolved Electron Number Densities in Plasmas

John W. Olesik, Su-Jane Den, and Kathryn R. Bradley

Applied Spectroscopy, Vol. 43, Issue 6, pp. 924-932 (1989)


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Abstract

An instrumental system based on a two-dimensional detector to measure electron number densities in plasmas is described. High-resolution H spectra are detected simultaneously at up to 200 spatial locations. Radially resolved electron number densities are determined, following Abel inversion and comparison of H line profiles to theoretical Stark-broadened spectra. The particular interpolation procedure used to calculate H spectra from discrete literature data can affect the calculated electron number density values. Radially and vertically resolved electron number maps for inductively coupled plasmas supported in Fassel-type and low-flow torches are presented, Electron number densities in the center of the 1.0-kW ICPs are less than 2.5 × 1014 cm−3. Short-term precision is better than 1% relative standard deviation except low in the center of the plasma, where the H intensity is low on-axis and larger off-axis.

Citation
John W. Olesik, Su-Jane Den, and Kathryn R. Bradley, "An Instrumental System for Simultaneous Measurement of Spatially Resolved Electron Number Densities in Plasmas," Appl. Spectrosc. 43, 924-932 (1989)
http://www.opticsinfobase.org/as/abstract.cfm?URI=as-43-6-924


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