Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 44,
  • Issue 1,
  • pp. 76-83
  • (1990)

Structure and Dynamics of a Magnetron DC Arc Plasma

Not Accessible

Your library or personal account may give you access

Abstract

A direct-current are plasma generator is described which uses a concentric electrode configuration and a magnetic field parallel to the electrode axis to obtain rotation of the are current channel at a frequency in the 1-3 kHz range. The anode is a hollow graphite cylinder, and the cathode is a thoriated tungsten wire. A magnetic field of several hundred gauss is obtained from one or more ring-shaped permanent ceramic magnets. For a 5-mm anode diameter, the plasma is diffuse, and the current channel has the form of a thin radial sheet which undergoes relatively small periodic perturbations at the rotational frequency. Design features, performance data, and plasma structure are considered.

PDF Article
More Like This
Spectroscopic study of a dc gas magnetron discharge

V. I. Miljevic
Appl. Opt. 22(6) 904-907 (1983)

Anode Temperatures and Characteristics of the dc Arc in Noble Gases*†

Bert L. Vallee and Milton R. Baker
J. Opt. Soc. Am. 46(2) 77-82 (1956)

Effects of B2O3 doping on the crystalline structure and performance of DC-magnetron-sputtered, transparent ZnO thin films

Anh Tuan Thanh Pham, Phuong Ai Thi Nguyen, Yen Kim Thi Phan, Truong Huu Nguyen, Dung Van Hoang, Oanh Kieu Truong Le, Thang Bach Phan, and Vinh Cao Tran
Appl. Opt. 59(19) 5845-5850 (2020)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved