Abstract

The temperature/spatial profile of an Ar ICP has been obtained by two-color infrared (IR) optical pyrometry. The temperatures range from 1668 to 2543 K, depending upon position and radio frequency (rf) input power. Results show at powers of 1.5 to 2.0 kW that the spatial dependence of the temperature closely resembles the spatial dependence of electron number density, suggesting that the electron number density plays an important role in determining the thermodynamic temperature.

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