Abstract

Laser spark emission spectroscopy is used to determine the elemental composition of contaminants found on electronic microcircuits fabricated on alumina substrates. This technique is particularly useful for rapid analyses of dielectric surfaces, and spatially resolved data with some degree of depth profiling information are obtained. Two specific examples are given which illustrate the utility of the method in pinpointing production problems.

Detection of uranyl fluoride and sand surface contamination on metal substrates by hand-held laser-induced breakdown spectroscopy

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Influence of metal substrates on the detection of explosive residues with laser-induced breakdown spectroscopy

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Application of laser-induced breakdown spectroscopy for real-time detection of contamination particles during the manufacturing process

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Rapid field screening of soils for heavy metals with spark-induced breakdown spectroscopy

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A Laser-Assisted Infrared Scanning Technique for Evaluating Bonded Connections on Beam Lead Microcircuits

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