Abstract

A method has been developed which calculates the thickness of the hydrocarbon overlayer from x-ray photoemission spectroscopy (XPS) spectra. The method is specific to each sample and utilizes the relative intensity of the C 1<i>s</i> peak and all other peaks. Attenuations calculated with this overlayer thickness yield more accurate substrate stoichiometries. A rough-sample model is also developed which not only explains previous anomalies in the thickness of hydrocarbon overlayer calculated but is capable of yielding further accuracy in substrate stoichiometries.

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