Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 47,
  • Issue 8,
  • pp. 1245-1250
  • (1993)

Improved Precision in a Resonance Ionization Mass Spectrometer by the Use of Stark-Shifted Spectral Lines as a Probe for Extraction Field

Not Accessible

Your library or personal account may give you access

Abstract

High-lying (Rydberg) electronic levels of sputtered Na atoms are spectrally shifted by the strong ion extracting electric field (≥12 kV/cm) present in a resonance ionization mass spectrometer (Stark effect). The Stark-shifted lines are a beneficial diagnostic to probe the ion source's local electric field, which is related to sample alignment and hence ion transmission efficiency. Changes in electric field of 1% can be detected spectrally, so the sample position is controlled to ≤10 μm by this technique. Results show that by the use of the Na spectrum as an alignment aid prior to sputter depth profiling, the precision of the RIMS instrument, as measured by the reproducibility of either the peak of the integrated signals from Be-implanted GaAs, is improved to about ±3%—at least a fourfold improvement over the best previous results. Spatial variations in the Be-ion implant dose over a GaAs wafer may be detected because of improved precision.

PDF Article
More Like This
Resonance ionization mass spectrometry of AlxGa1−xAs: depth resolution, sensitivity, and matrix effects

S. W. Downey, R. F. Kopf, E. F. Schubert, and J. M. Kuo
Appl. Opt. 29(33) 4938-4942 (1990)

Observation of autoionizing states of beryllium by resonance-ionization mass spectrometry

C. W. Clark, J. D. Fassett, T. B. Lucatorto, L. J. Moore, and W. W. Smith
J. Opt. Soc. Am. B 2(6) 891-896 (1985)

Resonance-ionization mass spectrometry of carbon

L. J. Moore, J. D. Fassett, J. C. Travis, T. B. Lucatorto, and C. W. Clark
J. Opt. Soc. Am. B 2(9) 1561-1565 (1985)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved