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Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 56,
  • Issue 3,
  • pp. 386-397
  • (2002)

Cavity Ringdown Spectroscopy for Diagnostic and Analytical Measurements in an Inductively Coupled Plasma

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Abstract

The use of cavity ringdown spectroscopy (CRDS) for atomic absorption measurements in a 27-MHz low-power argon inductively coupled plasma (ICP) is described. These results are used to demonstrate the utility of CRDS for both plasma diagnostic and analytical measurements. In these experiments, an aqueous solution of lead was introduced into a modified torch designed to enhance the ICP conditions for atomic absorption measurements. Absorption intensity characteristics of the lead 283.3-nm absorption line as a function of observation height and lateral position in the plasma were recorded for three different ICP powers (700, 500, and 200 W). The radial distribution of the ground-state lead atom density was derived from Abel inversion of the lateral measurements. At the novel 200 W operating condition, spectral line shapes vs. height and lateral position were fitted to Voigt profiles. Line-of-sight values of the gas kinetic temperature and electron density at different plasma locations were estimated from Gaussian and Lorentzian broadening components, respectively. The results are discussed and compared with those from other methods. The unique flexibility of CRDS for atomic and ionic absorption measurements in an ICP and the potential application of the ICP-CRDS technique for analytical measurements are demonstrated. Analytical results are compared with theoretical estimates of the lead detection limit.

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